{"title":"单晶硅表面的镜面和抗反射表面","authors":"S. Hadzialic, M. Taklo","doi":"10.1109/OMN.2013.6659061","DOIUrl":null,"url":null,"abstract":"We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"2021 1","pages":"65-66"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface\",\"authors\":\"S. Hadzialic, M. Taklo\",\"doi\":\"10.1109/OMN.2013.6659061\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"2021 1\",\"pages\":\"65-66\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659061\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659061","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface
We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.