Byoung-Suhk Kim, Dong Jun Lee, Sung-Kyu Min, Young‐Jun Kim, S. Kim, D. Yoon, H. Rhee
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Miscibility and Nanoporous Hybrid Film Fabrication of Methylsilsesquioxane (MSSQ) and Star-shaped Polymers
Abstract Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.
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