掺杂铟对化学喷雾热解法制备氧化锌薄膜气敏行为的影响

2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1) Pub Date : 2012-03-07 DOI:10.1109/ISPTS.2012.6260923

R. Nisha, K. Madhusoodanan, T. V. Vimalkumar, K. Vijayakumar

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引用次数: 4

摘要

对喷雾热解法制备的氧化锌薄膜的NO2气敏特性进行了研究。膜厚约为550nm。研究了铟掺杂对传感器性能的影响。在100 ~ 225℃的温度范围内测量了传感器的传感行为，找出了最佳工作温度。

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Effect of Indium doping on the Gas sensing behavior of Zinc oxide films obtained by Chemical spray pyrolysis method

NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.

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2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)

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