一个简单的金属蒸发器的结构安装在一个平面法兰与外径70毫米

Journal of The Vacuum Society of Japan Pub Date : 2016-01-01 DOI:10.3131/jvsj2.59.138

Masato Tanaka, H. Kodama, Kenta Hiraga, Nariaki Shohata, Yusaku Takano, Kotaro Yanase, T. Kikuchi, K. Mase

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引用次数: 0

摘要

构建一个简单的金属蒸发器安装在法兰Con‰的外径70毫米Masato田中Hiraku2 KODAMA Kenta HIRAGA2,Nariaki SHOHATA3 Yusaku TAKANO4,Kotaro濑进4,隆菊池5和Kazuhiko激射微波56 a)1电子和机械工程系,工程学院,千叶大学,133 Yayoi-cho Inage-ku, Chiba-shi,千叶263年至8522年,日本2物理系,工学院,795 Tokiwadai,横滨国立大学Hodogaya-ku Yokohama-shi,神奈川2408501、日本3工程科学学院,第三批大学,筑波大学,111 Tennodai Tsukuba-shi,茨城县305年至8573年,日本4教师教育、群马县大学42 Aramaki, Maebashi-shi,群马县371年至8510年,日本5材料结构科学研究所、钥匙、11嗳哟,Tsukuba-shi,茨城县305年至0801年,日本6 sokendai(高级研究研究生院),11嗳哟,Tsukuba-shi、茨城3050801,日本

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Construction of a Simple Metal Evaporator Mounted on a Conflat Flange with an Outer Diameter of 70 mm

Construction of a Simple Metal Evaporator Mounted on a Con‰at Flange with an Outer Diameter of 70 mm Masato TANAKA1, Hiraku KODAMA2, Kenta HIRAGA2, Nariaki SHOHATA3, Yusaku TAKANO4, Kotaro YANASE4, Takashi KIKUCHI5 and Kazuhiko MASE5,6,a) 1Department of Electronics and Mechanical Engineering, Faculty of Engineering, Chiba University, 133 Yayoi-cho, Inage-ku, Chiba-shi, Chiba 2638522, Japan 2Department of Physics, Faculty of Engineering, Yokohama National University, 795 Tokiwadai, Hodogaya-ku, Yokohama-shi, Kanagawa 2408501, Japan 3College of Engineering Sciences, Third Cluster of Colleges, University of Tsukuba, 111 Tennodai Tsukuba-shi, Ibaraki 3058573, Japan 4Faculty of Education, Gunma University, 42 Aramaki, Maebashi-shi, Gunma 3718510, Japan 5Institute of Materials Structure Science, KEK, 11 Oho, Tsukuba-shi, Ibaraki 3050801, Japan 6SOKENDAI (The Graduate University for Advanced Studies), 11 Oho, Tsukuba-shi, Ibaraki 3050801, Japan

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Journal of The Vacuum Society of Japan

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