C. Peng, J. Lau, C. Ko, Paul Lee, E. Lin, Kai-Ming Yang, P. Lin, Tim Xia, Leo Chang, N. Liu, Curry Lin, T. Lee, Jason Wang, M. Ma, T. Tseng
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Chiplets Heterogeneous Integration on High-Density Hybrid Substrate Using an Interconnect-Layer
In this study, a high-density organic hybrid substrate for chiplets heterogeneous integration is investigated. Emphasis is placed on the design, materials, process, fabrication, and characterization of the hybrid substrate with an interconnect-layer. A non-linear finite element analysis is performed to show the state of stress at the vias filled with a conductive paste of the interconnect-layer.