挠性微电子系统在扭转应力下的力学分析

Cha-Hee Kim, Jae-Min Kim, Seung-Ho Seo, Jae-hak Lee, J. Song, Won-Jun Lee
{"title":"挠性微电子系统在扭转应力下的力学分析","authors":"Cha-Hee Kim, Jae-Min Kim, Seung-Ho Seo, Jae-hak Lee, J. Song, Won-Jun Lee","doi":"10.1116/6.0000665","DOIUrl":null,"url":null,"abstract":"We modeled flexible microelectronic systems, in which a thinned silicon die is flip-chip bonded to a flexible substrate, and analyzed the stress and strain distribution generated during twisting deformation. Because of the presence of the rigid silicon die, the strain distribution of the system model was significantly different from that of the substrate model. Unlike the substrate model, there is no significant difference in the von Mises strain according to the position in both the molding layer and the substrate in the system model. Therefore, the results of modeling or testing only flexible substrate cannot be directly applied to predict the behavior of flexible microelectronic systems. The copper bumps revealed stress above the ultimate strength as well as the yield strength. Therefore, the copper bump would be the most mechanically weak component in the operation of the face-down flexible microelectronic system during twisting. By replacing copper bumps with polymer bumps, the maximum stress in the bumps can be significantly reduced from 282 to 47 MPa, and the maximum mechanically safe twisting angle was also improved from approximately 40° to 80°. Therefore, in flexible electronic systems where twisting deformation is applied, polymer bumps are a better bonding method than the conventional copper bumps.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-11-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Mechanical analysis of a flexible microelectronic system under twisting stress\",\"authors\":\"Cha-Hee Kim, Jae-Min Kim, Seung-Ho Seo, Jae-hak Lee, J. Song, Won-Jun Lee\",\"doi\":\"10.1116/6.0000665\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We modeled flexible microelectronic systems, in which a thinned silicon die is flip-chip bonded to a flexible substrate, and analyzed the stress and strain distribution generated during twisting deformation. Because of the presence of the rigid silicon die, the strain distribution of the system model was significantly different from that of the substrate model. Unlike the substrate model, there is no significant difference in the von Mises strain according to the position in both the molding layer and the substrate in the system model. Therefore, the results of modeling or testing only flexible substrate cannot be directly applied to predict the behavior of flexible microelectronic systems. The copper bumps revealed stress above the ultimate strength as well as the yield strength. Therefore, the copper bump would be the most mechanically weak component in the operation of the face-down flexible microelectronic system during twisting. By replacing copper bumps with polymer bumps, the maximum stress in the bumps can be significantly reduced from 282 to 47 MPa, and the maximum mechanically safe twisting angle was also improved from approximately 40° to 80°. Therefore, in flexible electronic systems where twisting deformation is applied, polymer bumps are a better bonding method than the conventional copper bumps.\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-11-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0000665\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000665","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

我们对柔性微电子系统进行了建模,其中薄硅芯片倒装在柔性衬底上,并分析了扭转变形时产生的应力和应变分布。由于刚性硅模的存在,系统模型的应变分布与衬底模型的应变分布明显不同。与基材模型不同的是,在系统模型中,von Mises应变随成型层和基材的位置不同而无显著差异。因此,仅对柔性衬底进行建模或测试的结果不能直接用于预测柔性微电子系统的行为。铜凸起处的应力高于极限强度和屈服强度。因此,在扭转过程中,铜凸起将是面朝下柔性微电子系统运行中最弱的机械部件。用聚合物凸起代替铜凸起后,凸起处的最大应力可从282 MPa显著降低到47 MPa,最大机械安全扭转角也从约40°提高到80°。因此,在应用扭转变形的柔性电子系统中,聚合物凸点是比传统铜凸点更好的粘合方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Mechanical analysis of a flexible microelectronic system under twisting stress
We modeled flexible microelectronic systems, in which a thinned silicon die is flip-chip bonded to a flexible substrate, and analyzed the stress and strain distribution generated during twisting deformation. Because of the presence of the rigid silicon die, the strain distribution of the system model was significantly different from that of the substrate model. Unlike the substrate model, there is no significant difference in the von Mises strain according to the position in both the molding layer and the substrate in the system model. Therefore, the results of modeling or testing only flexible substrate cannot be directly applied to predict the behavior of flexible microelectronic systems. The copper bumps revealed stress above the ultimate strength as well as the yield strength. Therefore, the copper bump would be the most mechanically weak component in the operation of the face-down flexible microelectronic system during twisting. By replacing copper bumps with polymer bumps, the maximum stress in the bumps can be significantly reduced from 282 to 47 MPa, and the maximum mechanically safe twisting angle was also improved from approximately 40° to 80°. Therefore, in flexible electronic systems where twisting deformation is applied, polymer bumps are a better bonding method than the conventional copper bumps.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies Ultradeep microaxicons in lithium niobate by focused Xe ion beam milling Self-powered ultraviolet photodiode based on lateral polarity structure GaN films Electrical conductivity across the alumina support layer following carbon nanotube growth
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1