脉冲激光在不同单晶衬底上生长无铅铁电Na0.5Bi0.5TiO3薄膜的外延生长和性能

F. Jean, M. Bousquet, J. Duclère, A. Boulle, F. Rémondière, S. Députier, J. Orlianges, P. Marchet, M. Guilloux-Viry
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摘要

利用脉冲激光沉积技术(PLD)成功地在多种单晶衬底上外延生长了无铅铁电Na0.5Bi0.5TiO3 (NBT)薄膜。目前的工作分为两部分,重点是:(i)在c-蓝宝石和r-蓝宝石(Al2O3)衬底上生长NBT层,有和没有引入CeO2缓冲层,以及(ii)在裸(001)SrTiO3衬底上生长NBT层,有和没有引入LaNiO3层,可以用作底部电极。在第一部分中,研究表明CeO2缓冲层的引入完全改变了NBT薄膜的面外生长取向及其微观结构。事实上,(001)NBT薄膜只能在外延(001)CeO2层缓冲的r-Al2O3衬底上生长,而在裸露的c或r-Al2O3衬底上生长,或在CeO2/c- al2o3异质结构上生长,则会导致多晶或织构薄膜。在第二部分中,我们证明了(001)取向的NBT层沉积在裸露的(001)SrTiO3或覆盖(001)LaNiO3 (LNO)的(001)SrTiO3衬底(STO)上是系统地外延生长的。此外,LaNiO3层的引入对样品的微观结构有很大的影响。
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Epitaxial growth and properties of lead-free ferroelectric Na0.5Bi0.5TiO3 thin films grown by pulsed laser deposition on various single crystal substrates
The epitaxial growth of lead-free ferroelectric Na0.5Bi0.5TiO3 (NBT) thin films on various single crystal substrates was successfully achieved, using the pulsed laser deposition technique (PLD). The present work is divided in two parts, focused on: (i) the growth of NBT layers on c- and r-sapphire (Al2O3) substrates, with and without introducing a CeO2 buffer layer, and (ii) the growth of NBT layers on bare (001)SrTiO3 substrates, with and without introducing a LaNiO3 layer, that could be used as a bottom electrode. In the first part, it was shown that the introduction of a CeO2 buffer layer completely modifies the out-of-plane growth orientation of the NBT films, as well as their microstructure. Indeed, (001)NBT films epitaxially grow only on r-Al2O3 substrates buffered with epitaxial (001)CeO2 layers, while, growing simply NBT on top of bare c or r-Al2O3 substrates, or on top of CeO2/c-Al2O3 heterostructures leads to polycrystalline or textured films. In the second part, we demonstrate that (001)-oriented NBT layers deposited on either bare (001)SrTiO3 or (001)SrTiO3 substrates (STO) covered with (001)LaNiO3 (LNO) are systematically epitaxially grown. Furthermore, the microstructure of the samples is strongly affected by the introduction of the LaNiO3 layer.
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