一种占地面积小、自由光谱范围大的MEMS可调谐光子环谐振器

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI:10.1109/TRANSDUCERS.2015.7181094

Carlos Errando-Herranz, F. Niklaus, G. Stemme, K. Gylfason

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引用次数: 10

摘要

我们展示了一个半径为20 μm，自由光谱范围为5 nm的MEMS可调谐硅光子环谐振器，用于可重构光网络中的波长选择。该器件显示负载Q为12000，在1544 nm波长下的调谐范围为300 pm。

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A MEMS tunable photonic ring resonator with small footprint and large free spectral range

We demonstrate a MEMS tunable silicon photonic ring resonator with a 20 μm radius and a 5 nm free spectral range (FSR) for wavelength selection in reconfigurable optical networks. The device shows a loaded Q of 12000, and 300 pm tuning range at a wavelength of 1544 nm.

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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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