梳状驱动级联反射镜的理论与实验研究

Wenhao Chen, Huahuang Luo, Mingzheng Duan, Hadi Tavakkoli, W. Piyawattanametha, Yi-Kuen Lee
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引用次数: 0

摘要

本文首次提出了具有级联结构的一维梳状驱动MEMS反射镜的二维理论模型。通过实验验证了包含不同阻尼机制和非线性电容力的数值模型。进行了稳定性分析,模拟了非线性迟滞频率响应。该模型可为设计多自由度高频率大扫描角非线性参数激励MEMS反射镜提供指导。
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Theoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures
For the first time, we present a two-dimensional theoretical model for one-dimensional comb-actuated MEMS mirror with cascaded structures. The numerical model including different damping mechanisms and nonlinear capacitive force is validated with experiment results. Stability analysis is conducted to simulate the nonlinear hysteretic frequency response. The model proposed can be a guideline for designing multi-degree-of-freedom nonlinear parametric-excited MEMS mirror with high frequency and large scan angle.
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