S. Mukhopadhyay, Hridibrata Pal, Sameer Narang, Chenyu Guo, Jichun Ye, Wei Guo, B. Sarkar
{"title":"基于横向极性结构GaN薄膜的自供电紫外光电二极管","authors":"S. Mukhopadhyay, Hridibrata Pal, Sameer Narang, Chenyu Guo, Jichun Ye, Wei Guo, B. Sarkar","doi":"10.1116/6.0001196","DOIUrl":null,"url":null,"abstract":"In this work, we report on a self-powered ultraviolet photodiode realized using lateral polarity structure (LPS) GaN films. The opposite nature of the polarization charge yields different barrier heights at the standard Ni/Au Schottky contact interface of N-polar and III-polar GaN films. As a result, a natural nonzero built-in potential is obtained in the LPS GaN photodiode, which showed photoresponsivity even at 0 V applied bias. The self-powered mechanism inside such an LPS GaN photodiode is discussed in detail by a combination of simulation prediction and experimental validation. Furthermore, a variation in the doping concentration of the adjacent III- and N-polar GaN domain is shown to improve the photoresponsivity compared to the conventional III-polar photodiode. Thus, this work validates that the LPS GaN photodiode is a promising candidate to realize self-powered operation and a general design rule for the photodiode with in-plane built-in potential.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"1 1","pages":"052206"},"PeriodicalIF":0.0000,"publicationDate":"2021-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Self-powered ultraviolet photodiode based on lateral polarity structure GaN films\",\"authors\":\"S. Mukhopadhyay, Hridibrata Pal, Sameer Narang, Chenyu Guo, Jichun Ye, Wei Guo, B. Sarkar\",\"doi\":\"10.1116/6.0001196\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we report on a self-powered ultraviolet photodiode realized using lateral polarity structure (LPS) GaN films. The opposite nature of the polarization charge yields different barrier heights at the standard Ni/Au Schottky contact interface of N-polar and III-polar GaN films. As a result, a natural nonzero built-in potential is obtained in the LPS GaN photodiode, which showed photoresponsivity even at 0 V applied bias. The self-powered mechanism inside such an LPS GaN photodiode is discussed in detail by a combination of simulation prediction and experimental validation. Furthermore, a variation in the doping concentration of the adjacent III- and N-polar GaN domain is shown to improve the photoresponsivity compared to the conventional III-polar photodiode. Thus, this work validates that the LPS GaN photodiode is a promising candidate to realize self-powered operation and a general design rule for the photodiode with in-plane built-in potential.\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":\"1 1\",\"pages\":\"052206\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-08-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0001196\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0001196","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Self-powered ultraviolet photodiode based on lateral polarity structure GaN films
In this work, we report on a self-powered ultraviolet photodiode realized using lateral polarity structure (LPS) GaN films. The opposite nature of the polarization charge yields different barrier heights at the standard Ni/Au Schottky contact interface of N-polar and III-polar GaN films. As a result, a natural nonzero built-in potential is obtained in the LPS GaN photodiode, which showed photoresponsivity even at 0 V applied bias. The self-powered mechanism inside such an LPS GaN photodiode is discussed in detail by a combination of simulation prediction and experimental validation. Furthermore, a variation in the doping concentration of the adjacent III- and N-polar GaN domain is shown to improve the photoresponsivity compared to the conventional III-polar photodiode. Thus, this work validates that the LPS GaN photodiode is a promising candidate to realize self-powered operation and a general design rule for the photodiode with in-plane built-in potential.