带有螺旋回线圈的MEMS Rogowski线圈电流传感器

IF 0.4 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Electrical Engineering in Japan Pub Date : 2022-10-19 DOI:10.1002/eej.23408

Yoshiyuki Watanabe, Mutsuto Kato, Toru Yahagi, Hiroki Murayama, Naoya Yamada, Kenichi Yoshida, Kenichi Maehara, Yusuke Fukuda, Kazuyuki Sashida, Katsuya Ikeda, Kosuke Ikeda, Toshiyuki Takemori

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引用次数: 1

摘要

我们开发了一种带有螺旋回圈的MEMS Rogowski线圈电流传感器。Rogowski线圈从边缘顺时针和逆时针方向形成在硅衬底上，用于电流检测和外部磁噪声补偿(器件尺寸为10 × 10 × 0.3 mm3，螺旋线圈135匝，通孔直径100 μm)。当压摆率(di/dt)恒定在10 A/μs，电流变化5 A ~ 40 A时，MEMS Rogowski线圈可以线性检测电流。当转换速率从10 A/μs变化到100 A/μs时，MEMS Rogowski线圈几乎可以线性地跟随参考传感器检测电流。因此，确认了由回路线圈进行外部噪声补偿。

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MEMS Rogowski coil current sensor with spiral return coil

We have developed a MEMS Rogowski coil current sensor with spiral return coil. The Rogowski coil is formed on a silicon substrate clockwise and counterclockwise from the edges, for current detection and external magnetic noise compensation (device size 10 × 10 × 0.3 mm³, spiral coil 135 turns, via diameter 100 μm). When the slew rate (di/dt) was kept constant at 10 A/μs, and the current was changed by 5 A up to 40 A, MEMS Rogowski coil could detect current linearly. When the slew rate was changed by 10 A/μs up to 100 A/μs, it was found that the MEMS Rogowski coil could detect current almost linearly following the reference sensor. Hence, external noise compensation by the return coil has been confirmed.

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来源期刊

Electrical Engineering in Japan 工程技术-工程：电子与电气

CiteScore

0.80

自引率

0.00%

发文量

审稿时长

4-8 weeks

期刊介绍： Electrical Engineering in Japan (EEJ) is an official journal of the Institute of Electrical Engineers of Japan (IEEJ). This authoritative journal is a translation of the Transactions of the Institute of Electrical Engineers of Japan. It publishes 16 issues a year on original research findings in Electrical Engineering with special focus on the science, technology and applications of electric power, such as power generation, transmission and conversion, electric railways (including magnetic levitation devices), motors, switching, power economics.