基于侧向力分析的尖端卷积效应检测

Chao Wang, Yongchun Fang
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引用次数: 1

摘要

原子力显微镜(AFM)以其优异的性能被广泛应用于各个领域。不幸的是,AFM的成像原理决定了扫描过程中发生尖端卷积,导致图像畸变。建立了侧向力与试样表面形貌的关系模型,分析了侧向力在尖端卷积过程中的变化规律。在此基础上,提出了一种基于侧向力分析的尖端卷积效应检测方法。该方法使用特定的图像直观地表示样品表面的地形图像中的畸变区域。实验表明,该方法能有效检测出图像中尖端卷积效应引起的畸变区域。
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Detection of tip convolution effects based on lateral force analysis
Atomic force microscopy (AFM) has been widely used in various fields due to its excellent performance. Unfortunately the imaging principle of an AFM determines that tip convolution occurs in the scanning process, resulting in image distortion. A model is established to reveal the relationship between the lateral force and the topography of sample surface, and the variation of the lateral force in the tip convolution process is analyzed. On this basis, a method for detecting tip convolution effects based on lateral force analysis is presented. The method uses a specific image to visually represent the distortion areas in the topography image of the sample surface. Experiments show that this method can effectively detect the distortion areas caused by the tip convolution effects in the image.
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