{"title":"基于侧向力分析的尖端卷积效应检测","authors":"Chao Wang, Yongchun Fang","doi":"10.1109/3M-NANO.2017.8286293","DOIUrl":null,"url":null,"abstract":"Atomic force microscopy (AFM) has been widely used in various fields due to its excellent performance. Unfortunately the imaging principle of an AFM determines that tip convolution occurs in the scanning process, resulting in image distortion. A model is established to reveal the relationship between the lateral force and the topography of sample surface, and the variation of the lateral force in the tip convolution process is analyzed. On this basis, a method for detecting tip convolution effects based on lateral force analysis is presented. The method uses a specific image to visually represent the distortion areas in the topography image of the sample surface. Experiments show that this method can effectively detect the distortion areas caused by the tip convolution effects in the image.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"13-18"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Detection of tip convolution effects based on lateral force analysis\",\"authors\":\"Chao Wang, Yongchun Fang\",\"doi\":\"10.1109/3M-NANO.2017.8286293\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Atomic force microscopy (AFM) has been widely used in various fields due to its excellent performance. Unfortunately the imaging principle of an AFM determines that tip convolution occurs in the scanning process, resulting in image distortion. A model is established to reveal the relationship between the lateral force and the topography of sample surface, and the variation of the lateral force in the tip convolution process is analyzed. On this basis, a method for detecting tip convolution effects based on lateral force analysis is presented. The method uses a specific image to visually represent the distortion areas in the topography image of the sample surface. Experiments show that this method can effectively detect the distortion areas caused by the tip convolution effects in the image.\",\"PeriodicalId\":6582,\"journal\":{\"name\":\"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"18 1\",\"pages\":\"13-18\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2017.8286293\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2017.8286293","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Detection of tip convolution effects based on lateral force analysis
Atomic force microscopy (AFM) has been widely used in various fields due to its excellent performance. Unfortunately the imaging principle of an AFM determines that tip convolution occurs in the scanning process, resulting in image distortion. A model is established to reveal the relationship between the lateral force and the topography of sample surface, and the variation of the lateral force in the tip convolution process is analyzed. On this basis, a method for detecting tip convolution effects based on lateral force analysis is presented. The method uses a specific image to visually represent the distortion areas in the topography image of the sample surface. Experiments show that this method can effectively detect the distortion areas caused by the tip convolution effects in the image.