用紫外脉冲激光微结构制备同位铌酸锂

Proceedings of ISAF-ECAPD-PFM 2012 Pub Date : 2012-07-09 DOI:10.1109/ISAF.2012.6297765

M. Stolze, T. Herrmann, B. Weigand, J. L’huillier

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引用次数: 4

摘要

我们利用波长为355nm、脉冲持续时间约为10ps的激光，在c+侧和c—侧对LiNbO3进行了不同脉冲能量的单次实验。此外，我们还在LiNbO3的c+侧展示了具有高空间脉冲重叠的激光微加工凹槽。在1.2μm的烧蚀深度下，获得了低至20 nm的侧壁粗糙度(rms)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Laser microstructuring of congruent lithium niobate by UV ps-pulses

We present single shot experiments at different pulse energies for LiNbO₃ on c⁺-side and c^--side by using a laser wavelength of 355 nm and a pulse duration of about 10 ps. Furthermore, we demonstrate laser micromachined grooves with high spatial pulse overlap on the c⁺-side of LiNbO₃. Here a (rms) sidewall roughness as low as 20 nm has been achieved at an ablation depth of 1.2μm.

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Proceedings of ISAF-ECAPD-PFM 2012

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