采用CH/sub /H/sub / 2/干刻蚀和再生制备1.5 /spl μ m波长GaInAsP/InP 5层量子线激光器

Hideki Midorikawa, K. Muranushi, N. Nunoya, T. Sano, S. Tamura, S. Arai
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引用次数: 1

摘要

报道了线宽为23nm的SC - 5层q线激光器的激光特性。在阈值以下的自发发射效率几乎与高达85℃的q膜激光器相当,显示出蚀刻/再生界面的低损伤特性。
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1.5 /spl mu/m wavelength GaInAsP/InP 5-layered quantum-wire lasers fabricated by CH/sub 4//H/sub 2/ dry etching and regrowth
We report on the lasing properties of SC 5-layered Q-wire lasers with wire width of 23 nm. The spontaneous emission efficiency below the threshold was almost comparable to that of the Q-film lasers up to 85 C, that revealed low-damage property of the etched/regrown interfaces.
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