N. J. Engelsen, Aman R. Agrawal, Dalziel J. Wilson
{"title":"通过耗散稀释的超高q纳米力学:趋势和前景","authors":"N. J. Engelsen, Aman R. Agrawal, Dalziel J. Wilson","doi":"10.1109/Transducers50396.2021.9495394","DOIUrl":null,"url":null,"abstract":"Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in $Q$ factor) every three years. This paper reviews advances which led to this point, including phononic crystal “soft-clamping,” strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"12 1","pages":"201-205"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ultra-High-Q Nanomechanics Through Dissipation Dilution: Trends and Perspectives\",\"authors\":\"N. J. Engelsen, Aman R. Agrawal, Dalziel J. Wilson\",\"doi\":\"10.1109/Transducers50396.2021.9495394\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in $Q$ factor) every three years. This paper reviews advances which led to this point, including phononic crystal “soft-clamping,” strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.\",\"PeriodicalId\":6814,\"journal\":{\"name\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"volume\":\"12 1\",\"pages\":\"201-205\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/Transducers50396.2021.9495394\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/Transducers50396.2021.9495394","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ultra-High-Q Nanomechanics Through Dissipation Dilution: Trends and Perspectives
Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in $Q$ factor) every three years. This paper reviews advances which led to this point, including phononic crystal “soft-clamping,” strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.