基于复合半导体纳米线/纳米带的电子学和光子学原型器件

L. Dai, G. Qin
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引用次数: 0

摘要

本文采用化学气相沉积法合成和原位掺杂了几种重要的n型和p型化合物半导体一维纳米材料,并基于这些纳米材料制备了纳米电子和纳米光子原型器件。各种高性能的纳米电子器件,包括金属-绝缘体-半导体场效应晶体管(fet),金属-半导体场效应晶体管,以及基于fet的NOT, NOR和NAND逻辑门,已经被制造和研究。制备和研究了各种NW (NB)/p+-Si异质结电致发光器件。制作了CdS NW环形腔,并采用一种具有fabry - p腔结构的直型CdS NW对环形腔的光进行耦合。
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Electronics and photonics prototype devices based on compound semiconductor nanowires/nanobelts
We present synthesis and in-situ doping of several important n-type and p-type compound semiconductor 1D nanomaterials via the chemical vapor deposition method, and the nanoelectroic and nanophotonic prototype devices based on these nanomaterials. Various high performance nanoelectroic devices, including metal-insulator-semiconductor field-effect transistors (FETs), metal-semiconductor FETs, and NOT, NOR and NAND logic gates based on FETs, have been fabricated and studied. Various NW (NB)/p+-Si heterojunction electroluminescence devices have been fabricated and studied. CdS NW ring cavities were fabricated and a straight CdS NW with Fabry-Pérot cavity structure was employed to couple the light out from the ring cavity.
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