基于mems的角速率传感器

Proceedings of IEEE Sensors, 2004. Pub Date : 2004-01-01 DOI:10.1109/ICSENS.2004.1426250

Inseob Song, Byeungleul Lee

{"title":"基于mems的角速率传感器","authors":"Inseob Song, Byeungleul Lee","doi":"10.1109/ICSENS.2004.1426250","DOIUrl":null,"url":null,"abstract":"The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":"184 1","pages":"650-653 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"MEMS-based angular rate sensors\",\"authors\":\"Inseob Song, Byeungleul Lee\",\"doi\":\"10.1109/ICSENS.2004.1426250\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.\",\"PeriodicalId\":20476,\"journal\":{\"name\":\"Proceedings of IEEE Sensors, 2004.\",\"volume\":\"184 1\",\"pages\":\"650-653 vol.2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2004.1426250\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426250","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

基于mems的角速率传感器的发展在低功耗、小尺寸和低成本方面提供了革命性的改进。在大量商业市场需求的推动下，价格低于10美元/轴的中等性能组件的应用继续增长。该技术的持续成熟将使新的应用和市场得以实现。本文综述了三星电子基于mems的角速率传感器的发展及其在消费电子领域的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

MEMS-based angular rate sensors

The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of IEEE Sensors, 2004.

自引率

0.00%

发文量