高性能自组装ZnO纳米皱纹网络结构光电探测器

Jongyun Choi, G. Lee, Sung‐Nam Lee
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摘要

本文研究了预焙温度对溶胶-凝胶生长过程中形成的用于紫外光检测的氧化锌纳米皱纹结构的表面结构的影响。将溶胶-凝胶溶液自旋涂覆在玻璃和c - plane蓝宝石衬底上,得到的ZnO薄膜在800°c下进行预焙和结晶1小时。在溶胶-凝胶工艺中,预焙过程是形成ZnO薄膜表面纳米褶皱结构的关键。在预焙温度为150℃时,ZnO薄膜的纳米褶皱结构达到最大。除了形成优化的纳米皱纹结构外,通过预焙温度控制进一步增强了光电探测器的紫外响应。纳米皱纹网络结构显著提高了ZnO薄膜的光吸收和光致发光特性,从而提高了紫外光的光电流、光响应性和外量子效率。结果表明,溶胶-凝胶衍生的具有纳米皱纹网络结构的ZnO光电探测器具有紫外传感应用的潜力。
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High‐Performance Self‐Assembled ZnO Nanowrinkle Network Structured Photodetectors
Herein, the effect of prebake temperature on the surface structure of zinc oxide (ZnO) nanowrinkle structures formed in a sol–gel growth process for UV photodetection is demonstrated. The sol–gel solutions are spin‐coated on glass and c‐plane sapphire substrates, and the resulting ZnO films are subjected to prebake and crystallization processes at 800 °C for an hour. In the sol–gel process, the prebake process is crucial in forming the nanowrinkle structure on the surface of the ZnO film. The maximum nanowrinkle structure of ZnO film is achieved at the prebake temperature of 150 °C. In addition to the formation of the optimized nanowrinkle structure, the UV response of the photodetector is further enhanced through the prebake temperature control. The nanowrinkle network structure significantly improves the optical absorbance and photoluminescence characteristics of the ZnO film, leading to high photocurrent, photoresponsivity, and external quantum efficiency for UV light. The results demonstrate the potential of sol–gel‐derived ZnO photodetectors with nanowrinkle network structures for UV sensing applications.
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