纳米电子学和低温电子学用半导体材料

D. Hiller, R. Duffy, V. Georgiev, W. Weber
{"title":"纳米电子学和低温电子学用半导体材料","authors":"D. Hiller, R. Duffy, V. Georgiev, W. Weber","doi":"10.1002/pssa.202300429","DOIUrl":null,"url":null,"abstract":"This Special Section of physica status solidi (a) covers presentations of Symposium I held at the 2022 Fall-EMRS Meeting in Warsaw, Poland. Group-IV semiconductors, namely Si, Ge, Sn and their compounds, are the most important materials in microand nanoelectronics but they will also play a key role in future quantum devices. This symposium aimed to share the latest research in the field of group-IV nanoelectronic materials and devices. Silicon (Si) is one of the most dominant semiconductor materials with versatile applications ranging from electronics over photovoltaics to sensors and actuators. Due to their intrinsically higher electron and hole mobility germanium (Ge) or silicongermanium (SiGe) are rapidly gaining interest in microand nanoelectronics. The same holds true for tin (Sn) and its alloys with the other group-IV semiconductors (e.g., GeSn). In current nanoelectronics research with device dimensions approaching the single-digit-nanometer scale, nanowires are often the building blocks of transistors. However, many processing methods and device concepts have to be adopted since nanostructures are generically subject to nano-size and quantum effects. These effects involve for instance quantum confinement, dielectric confinement, detrimental surface states, statistical issues of doping ultrasmall volumes, etc. This bears the risk to deteriorate the performance and reliability or even cause complete failure of the transistors. On the other hand, if fully understood, nano-size and quantum effects may open up new vistas for increased performance, reduced power consumption or even routes towards quantum computing. Generally, nanostructures have a high surface-to-volume ratio and their properties are often dominated by the surface. Therefore, an increased understanding of the physical and chemical properties of group-IV semiconductor nanostructure interfaces to metals and dielectrics is mandatory to control and optimize gate control, threshold voltage, ohmic contacts, carrier transport, etc. Finally, simulations and modelling are crucial for nanoelectronics, starting from ab-initio methods to model physical/ quantum-chemical properties of group-IV nanostructures to device simulations modelling transport and performance. There are in total four research articles in this Special Section: Knoch et al. investigate by simulations and experiments the influence of the oxide-channel interfaces on the switching behavior of cryogenic field-effect transistors as well as the possibility to use a different approach than conventional doping for ultrasmall Si-nanostructures (article number 2300069). Ratschinski et al. report about another alternative silicon doping method, similar to modulation doping of III–V semiconductors, that is based on Al-doped SiO2 shells around Si nanowires (article number 2300068). The authors reveal that the electrical resistance of the nanowires is thereby reduced by several orders of magnitude. In article number 2300066, Frentzen et al. show that the electronic structure of ultrathin Si quantum wells can be shifted by embedding them in different dielectrics, i.e., SiO2 (n-type) vs. Si3N4 (p-type) behavior. Hence, this so-called NESSIAS-effect completely avoids impurity doping. Galderisi et al. study the temperature dependence of the switching behavior of reconfigurable field-effect transistors (RFET) and demonstrate how these nanoelectronics devices at extreme temperatures ranging from 80 to 475 K (article number 2300019). We thank all participants of our symposium, in particular the invited speakers, the scientific committee members, the authors of the Special Section papers, and the editors of physica status solidi (a). In addition, we appreciate the support of our symposium sponsor the European Nanoelectronics Network ASCENTþ.","PeriodicalId":87717,"journal":{"name":"Physica status solidi (A): Applied research","volume":"67 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Group‐IV Semiconductor Materials for Nanoelectronics and Cryogenic Electronics\",\"authors\":\"D. Hiller, R. Duffy, V. Georgiev, W. Weber\",\"doi\":\"10.1002/pssa.202300429\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This Special Section of physica status solidi (a) covers presentations of Symposium I held at the 2022 Fall-EMRS Meeting in Warsaw, Poland. Group-IV semiconductors, namely Si, Ge, Sn and their compounds, are the most important materials in microand nanoelectronics but they will also play a key role in future quantum devices. This symposium aimed to share the latest research in the field of group-IV nanoelectronic materials and devices. Silicon (Si) is one of the most dominant semiconductor materials with versatile applications ranging from electronics over photovoltaics to sensors and actuators. Due to their intrinsically higher electron and hole mobility germanium (Ge) or silicongermanium (SiGe) are rapidly gaining interest in microand nanoelectronics. The same holds true for tin (Sn) and its alloys with the other group-IV semiconductors (e.g., GeSn). In current nanoelectronics research with device dimensions approaching the single-digit-nanometer scale, nanowires are often the building blocks of transistors. However, many processing methods and device concepts have to be adopted since nanostructures are generically subject to nano-size and quantum effects. These effects involve for instance quantum confinement, dielectric confinement, detrimental surface states, statistical issues of doping ultrasmall volumes, etc. This bears the risk to deteriorate the performance and reliability or even cause complete failure of the transistors. On the other hand, if fully understood, nano-size and quantum effects may open up new vistas for increased performance, reduced power consumption or even routes towards quantum computing. Generally, nanostructures have a high surface-to-volume ratio and their properties are often dominated by the surface. Therefore, an increased understanding of the physical and chemical properties of group-IV semiconductor nanostructure interfaces to metals and dielectrics is mandatory to control and optimize gate control, threshold voltage, ohmic contacts, carrier transport, etc. Finally, simulations and modelling are crucial for nanoelectronics, starting from ab-initio methods to model physical/ quantum-chemical properties of group-IV nanostructures to device simulations modelling transport and performance. There are in total four research articles in this Special Section: Knoch et al. investigate by simulations and experiments the influence of the oxide-channel interfaces on the switching behavior of cryogenic field-effect transistors as well as the possibility to use a different approach than conventional doping for ultrasmall Si-nanostructures (article number 2300069). Ratschinski et al. report about another alternative silicon doping method, similar to modulation doping of III–V semiconductors, that is based on Al-doped SiO2 shells around Si nanowires (article number 2300068). The authors reveal that the electrical resistance of the nanowires is thereby reduced by several orders of magnitude. In article number 2300066, Frentzen et al. show that the electronic structure of ultrathin Si quantum wells can be shifted by embedding them in different dielectrics, i.e., SiO2 (n-type) vs. Si3N4 (p-type) behavior. Hence, this so-called NESSIAS-effect completely avoids impurity doping. Galderisi et al. study the temperature dependence of the switching behavior of reconfigurable field-effect transistors (RFET) and demonstrate how these nanoelectronics devices at extreme temperatures ranging from 80 to 475 K (article number 2300019). We thank all participants of our symposium, in particular the invited speakers, the scientific committee members, the authors of the Special Section papers, and the editors of physica status solidi (a). In addition, we appreciate the support of our symposium sponsor the European Nanoelectronics Network ASCENTþ.\",\"PeriodicalId\":87717,\"journal\":{\"name\":\"Physica status solidi (A): Applied research\",\"volume\":\"67 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physica status solidi (A): Applied research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1002/pssa.202300429\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physica status solidi (A): Applied research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/pssa.202300429","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本物理状态专题(a)涵盖了在波兰华沙举行的2022年秋季emrs会议上举行的研讨会I的演讲。第四族半导体,即Si, Ge, Sn及其化合物,是微电子和纳米电子学中最重要的材料,但它们也将在未来的量子器件中发挥关键作用。本次研讨会旨在分享第四族纳米电子材料和器件领域的最新研究成果。硅(Si)是最主要的半导体材料之一,具有广泛的应用,从电子到光伏到传感器和执行器。由于锗(Ge)或硅锗(SiGe)本身具有较高的电子和空穴迁移率,因此在微电子和纳米电子学领域迅速引起了人们的兴趣。这同样适用于锡(Sn)及其与其他iv族半导体(如GeSn)的合金。在目前的纳米电子学研究中,随着器件尺寸接近个位数纳米尺度,纳米线通常是晶体管的基本组成部分。然而,由于纳米结构通常受纳米尺寸和量子效应的影响,因此必须采用许多加工方法和器件概念。这些影响包括量子约束、介电约束、有害表面态、掺杂超小体积的统计问题等。这样做的风险是降低性能和可靠性,甚至导致晶体管完全失效。另一方面,如果完全理解,纳米尺寸和量子效应可能会为提高性能、降低功耗甚至量子计算开辟新的前景。通常,纳米结构具有较高的表面体积比,其性能往往由表面决定。因此,增加对第四族半导体纳米结构与金属和电介质界面的物理和化学性质的理解对于控制和优化栅极控制、阈值电压、欧姆接触、载流子输运等是必不可少的。最后,模拟和建模对纳米电子学至关重要,从从头算方法开始模拟第四族纳米结构的物理/量子化学性质,到模拟传输和性能的器件模拟。本专题共发表了四篇研究文章:Knoch等人通过模拟和实验研究了氧化物通道界面对低温场效应晶体管开关行为的影响,以及在超小型硅纳米结构中使用不同于传统掺杂方法的可能性(文章编号2300069)。Ratschinski等人报道了另一种替代硅掺杂方法,类似于III-V型半导体的调制掺杂,该方法基于硅纳米线周围掺杂al的SiO2壳层(文章号2300068)。作者揭示,纳米线的电阻因此降低了几个数量级。在2300066号文章中,Frentzen等人表明超薄硅量子阱的电子结构可以通过将其嵌入不同的介电介质中而发生位移,即SiO2 (n型)与Si3N4 (p型)的行为。因此,这种所谓的nessias效应完全避免了杂质掺杂。Galderisi等人研究了可重构场效应晶体管(RFET)开关行为的温度依赖性,并演示了这些纳米电子器件如何在80至475 K的极端温度范围内工作(文章编号2300019)。我们感谢本次研讨会的所有参与者,特别是受邀的演讲者、科学委员会成员、专题部分论文的作者和物理状态固体(a)的编辑。此外,我们感谢本次研讨会的赞助商欧洲纳米电子网络(ASCENTþ)的支持。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Group‐IV Semiconductor Materials for Nanoelectronics and Cryogenic Electronics
This Special Section of physica status solidi (a) covers presentations of Symposium I held at the 2022 Fall-EMRS Meeting in Warsaw, Poland. Group-IV semiconductors, namely Si, Ge, Sn and their compounds, are the most important materials in microand nanoelectronics but they will also play a key role in future quantum devices. This symposium aimed to share the latest research in the field of group-IV nanoelectronic materials and devices. Silicon (Si) is one of the most dominant semiconductor materials with versatile applications ranging from electronics over photovoltaics to sensors and actuators. Due to their intrinsically higher electron and hole mobility germanium (Ge) or silicongermanium (SiGe) are rapidly gaining interest in microand nanoelectronics. The same holds true for tin (Sn) and its alloys with the other group-IV semiconductors (e.g., GeSn). In current nanoelectronics research with device dimensions approaching the single-digit-nanometer scale, nanowires are often the building blocks of transistors. However, many processing methods and device concepts have to be adopted since nanostructures are generically subject to nano-size and quantum effects. These effects involve for instance quantum confinement, dielectric confinement, detrimental surface states, statistical issues of doping ultrasmall volumes, etc. This bears the risk to deteriorate the performance and reliability or even cause complete failure of the transistors. On the other hand, if fully understood, nano-size and quantum effects may open up new vistas for increased performance, reduced power consumption or even routes towards quantum computing. Generally, nanostructures have a high surface-to-volume ratio and their properties are often dominated by the surface. Therefore, an increased understanding of the physical and chemical properties of group-IV semiconductor nanostructure interfaces to metals and dielectrics is mandatory to control and optimize gate control, threshold voltage, ohmic contacts, carrier transport, etc. Finally, simulations and modelling are crucial for nanoelectronics, starting from ab-initio methods to model physical/ quantum-chemical properties of group-IV nanostructures to device simulations modelling transport and performance. There are in total four research articles in this Special Section: Knoch et al. investigate by simulations and experiments the influence of the oxide-channel interfaces on the switching behavior of cryogenic field-effect transistors as well as the possibility to use a different approach than conventional doping for ultrasmall Si-nanostructures (article number 2300069). Ratschinski et al. report about another alternative silicon doping method, similar to modulation doping of III–V semiconductors, that is based on Al-doped SiO2 shells around Si nanowires (article number 2300068). The authors reveal that the electrical resistance of the nanowires is thereby reduced by several orders of magnitude. In article number 2300066, Frentzen et al. show that the electronic structure of ultrathin Si quantum wells can be shifted by embedding them in different dielectrics, i.e., SiO2 (n-type) vs. Si3N4 (p-type) behavior. Hence, this so-called NESSIAS-effect completely avoids impurity doping. Galderisi et al. study the temperature dependence of the switching behavior of reconfigurable field-effect transistors (RFET) and demonstrate how these nanoelectronics devices at extreme temperatures ranging from 80 to 475 K (article number 2300019). We thank all participants of our symposium, in particular the invited speakers, the scientific committee members, the authors of the Special Section papers, and the editors of physica status solidi (a). In addition, we appreciate the support of our symposium sponsor the European Nanoelectronics Network ASCENTþ.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Effects of BiFeO3 thickness on the write‐once‐read‐many‐times resistive switching behavior of Pt/BiFeO3/LaNiO3 heterostructure Laser treatment of dental implants towards an optimized osseointegration: evaluation via TM‐AFM and SEM An analytical tooth model based on SPR chips coated with hydroxyapatite used for investigation of the acquired dental pellicle Investigation of the Effect of ZnO Film Thickness Over the Gas Sensor Developed for Sensing Carbon Monoxide AlGaN‐Based Solar‐Blind Ultraviolet Detector with a Response Wavelength of 217 nm
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1