{"title":"悬臂梁式宽带微机械热电微波功率传感器的研究","authors":"D. B. Wang, Y. M. Fang","doi":"10.1109/TRANSDUCERS.2015.7181139","DOIUrl":null,"url":null,"abstract":"This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam\",\"authors\":\"D. B. Wang, Y. M. Fang\",\"doi\":\"10.1109/TRANSDUCERS.2015.7181139\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.\",\"PeriodicalId\":6465,\"journal\":{\"name\":\"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2015.7181139\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2015.7181139","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam
This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.
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