氧压对Bi0.90La0.10Fe0.95Mn0.05O3薄膜结构、电学性能的影响及记忆性能表征

J. Kolte, A. Daryapurkar, P. Apte, P. Gopalan
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引用次数: 1

摘要

铋铁氧体(BiFeO3)由于其大极化和无铅的额外优势,是未来一代FeRAM的潜在候选者。采用脉冲激光沉积法制备了La和Mn掺杂的BiFeO3 (BLFMO)薄膜。研究了氧分压对合金结构和疲劳性能的影响。研究发现,薄膜的极化对氧分压非常敏感。在200kV/cm时,泄漏电流密度约为10-7 A/cm2。铁电极化为73 μC/cm2,矫顽力为200kV/cm。BLFMO薄膜在500kV/cm下的疲劳耐久性试验表明,108次脉冲后薄膜几乎无疲劳。保留测试也进行了,发现极化只有3%的变化,直到105秒,从而使BFO成为一个有前途的候选内存应用。
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Effect of oxygen pressure on the structural, electrical properties of Bi0.90La0.10Fe0.95Mn0.05O3 thin films and characterization for memory applications
Bismuth ferrite (BiFeO3) is a potential candidate for future generation of FeRAM due to its large polarization with additional advantage of being lead free. La and Mn doped BiFeO3 (BLFMO) thin films were deposited by pulsed laser deposition. Effect of oxygen partial pressure on the structural and fatigue properties were studied. It has been found that polarization of thin film is very sensitive to the oxygen partial pressure. The leakage current density found to be in the order of 10-7 A/cm2 at 200kV/cm. Ferroelectric polarization is 73 μC/cm2 and coercive field is 200kV/cm. Fatigue endurance test of BLFMO thin film at 500kV/cm shows films almost fatigue free after 108 pulses. Retention test also carried out and found that there is only 3% change in the polarization up to 105 seconds, thereby making BFO a promising candidate for memory applications.
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