{"title":"基于薄膜体声谐振器的质量传感器","authors":"Biyan Wu","doi":"10.1109/BMEI.2009.5305157","DOIUrl":null,"url":null,"abstract":"A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.","PeriodicalId":6389,"journal":{"name":"2009 2nd International Conference on Biomedical Engineering and Informatics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Mass Sensor Based on Thin Film Bulk Acoustic Resonator\",\"authors\":\"Biyan Wu\",\"doi\":\"10.1109/BMEI.2009.5305157\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.\",\"PeriodicalId\":6389,\"journal\":{\"name\":\"2009 2nd International Conference on Biomedical Engineering and Informatics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 2nd International Conference on Biomedical Engineering and Informatics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/BMEI.2009.5305157\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 2nd International Conference on Biomedical Engineering and Informatics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BMEI.2009.5305157","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mass Sensor Based on Thin Film Bulk Acoustic Resonator
A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.
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