F. Xiong, M. Bae, Yuan Dai, A. Liao, A. Behnam, E. Carrion, Sungduk Hong, D. Ielmini, E. Pop
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Nanowire phase change memory with carbon nanotube electrodes
Phase change material (PCM) nanowires (NWs) that are self-aligned with carbon nanotube (CNT) electrodes that achieves a switching currents of the order ~1 μA, over two orders of magnitude below industrial state of the art, is described. The programming currents, ~0.1 μA SET, ~1.6 μA RESET, and power dissipation of the fabricated self-aligned PCM NW devices are among the lowest reported to date. The nanopatterning method used can be applied to probe other nanomaterials by automatically aligning them with CNT electrodes.