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Enhancement-mode Al045Ga0.55N/Al0.3Ga0.7N High Electron Mobility Transistor with p-Al0.3Ga0.7N Gate 带p-Al0.3Ga0.7N栅极的增强型Al045Ga0.55N/Al0.3Ga0.7N高电子迁移率晶体管
Pub Date : 2018-01-01 DOI: 10.1109/DRC.2018.8444130
E. Douglas, B. Klein, A. Allerman, A. Baca, T. Fortune, A. Armstrong
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引用次数: 0
CMOS-compatible Ti/Al ohmic contacts (R c ° C) cmos兼容的Ti/Al欧姆触点(R°c)
Pub Date : 2014-06-22 DOI: 10.1109/DRC.2014.6872304
Zhihong Liu, M. Heuken, D. Fahle, G. Ng, T. Palacios
Recently the development of CMOS-compatible fabrication technologies for GaN HEMTs has attracted increasing levels of interest [1]-[4]. A low temperature ohmic contact technology is required for gate-first device fabrication and CMOS-first GaN-Si integration process, however, typical ohmic contacts need annealing at > 800°C [1], [2]. In the past, we have reported an approach to realize low contact resistance (R C) using CMOS-compatible metal schemes annealed at 500°C through an n +-GaN/n-AlGaN/GaN structure [4]. This method has a drawback that the n-doped AlGaN barrier increases the gate leakage current. In this work, we present the first low temperature (<;450°C) CMOS-compatible Ti/Al ohmic contact technology for conventional unintentionally-doped AlGaN/AlN/GaN HEMT structures.
最近,GaN hemt的cmos兼容制造技术的发展引起了越来越多的关注[1]-[4]。栅极优先器件制造和cmos优先GaN-Si集成工艺需要低温欧姆接触技术,但典型的欧姆接触需要在> 800°C下退火[1],[2]。过去,我们已经报道了一种通过n +-GaN/n- algan /GaN结构在500°C退火的cmos兼容金属方案实现低接触电阻(R C)的方法[4]。这种方法有一个缺点,即n掺杂的AlGaN势垒增加了栅漏电流。在这项工作中,我们提出了第一个低温(<;450°C) cmos兼容的Ti/Al欧姆接触技术,用于传统的无意掺杂AlGaN/AlN/GaN HEMT结构。
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引用次数: 5
Electrical control of nuclear-spin-induced Hall voltage in an inverted InAs heterostructure 反向InAs异质结构中核自旋诱导霍尔电压的电气控制
Pub Date : 2012-08-02 DOI: 10.1109/DRC.2012.6256996
T. Ishikura, Z. Cui, K. Yoh
We have fabricated a nuclear spin manipulation device by spin injection from ferromagnetic (FM) electrode into in InAs channel and the operation was confirmed by Hall voltage near the FM/semiconductor interface. Injected electron spins are transferred to nuclear spin angular momentum by hyperfine interaction known as Overhauser effect. [1] Previously, it was reported that nuclear spin polarization in semiconductor by edge current in quantum Hall state [2] and nonlocal lateral spin valve configuration. [3] Compared with these samples working only in extreme conditions, we propose a nuclear spin device, which is electrically controllable at room temperature. Spin induced local magnetic filed was estimated to be the order of kGauss, resulting in a few tens of mV range in Hall voltage [4-5]. Electrical manipulation of local nuclear spin angular momentum would provide a new horizon on device applications of spintronics.
我们从铁磁(FM)电极向InAs通道注入自旋,制作了一个核自旋操纵装置,并通过FM/半导体界面附近的霍尔电压证实了该操作。注入的电子自旋通过被称为奥弗豪瑟效应的超精细相互作用转化为核自旋角动量。[1]先前有报道称,半导体中的核自旋极化是通过量子霍尔态的边电流[2]和非局域横向自旋阀构型实现的。[3]与这些只能在极端条件下工作的样品相比,我们提出了一种室温下可控的核自旋装置。自旋诱导的局部磁场估计为k高斯数量级,导致霍尔电压在几十mV范围内[4-5]。局部核自旋角动量的电处理将为自旋电子学的器件应用提供新的前景。
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引用次数: 1
Role of screening, heating, and dielectrics on high-field transport in graphene 筛选、加热和电介质在石墨烯高场输运中的作用
Pub Date : 2012-08-02 DOI: 10.1109/DRC.2012.6256940
A. Serov, Z. Ong, V. Dorgan, E. Pop
Graphene is an interesting material for electronic applications due to its high intrinsic mobility at low-field. However, high-field transport in graphene is less well understood, with the simple assumption often made that it is limited by substrate optical phonon (SO) scattering. Here we model high-field transport in graphene on several dielectric substrates including SO and graphene phonons, proper charge screening, impurity scattering, and self-heating effects. Our model is carefully calibrated against existing experimental data for graphene on SiO2 [1] at several ambient temperatures and different carrier densities. We then use it to investigate transport in graphene on other dielectrics where experiments do not exist yet.
石墨烯由于其在低场下的高固有迁移率而成为一种有趣的电子应用材料。然而,人们对石墨烯中的高场输运知之甚少,通常认为它受到衬底光学声子(SO)散射的限制。在这里,我们模拟了石墨烯在几种介质衬底上的高场输运,包括SO和石墨烯声子,适当的电荷筛选,杂质散射和自热效应。我们的模型是根据现有的实验数据在不同的环境温度和不同的载流子密度下对二氧化硅上的石墨烯[1]进行仔细校准的。然后,我们用它来研究石墨烯在其他电介质上的输运,这些实验还不存在。
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引用次数: 0
Piezotronics and piezo-phototronics
Pub Date : 2012-07-17 DOI: 10.1007/978-3-642-34237-0
Zhong Lin Wang
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引用次数: 113
Effect of interfacial phonon-plasmon modes on electrical transport in supported graphene 界面声子-等离子体模式对负载石墨烯中电输运的影响
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256961
Z. Ong, M. Fischetti
This paper discusses the effects of interfacial phonon-plasmon modes on electrical transport in supported graphene. The mobility in graphene supported on an insulating dielectric substrate (such as SiO2) is typically due to scattering by charged impurities, surface roughness and surface polar phonon (SPP) modes. Although impurity scattering is the dominant factor limiting electron mobility it can be reduced experimentally. Coupling between the SPP and graphene plasmon modes leads to the formation of interfacial phonon-plasmon (lPP) modes which can also be interpreted as screened SPP modes. IPP dispersion and electron-IPP scattering rates were used for different substrates (SiO2, h-BN, HfO2 and Al2O3) to calculate the substrate-limited conductivity and field mobility of supported graphene.
本文讨论了界面声子-等离子体模式对负载石墨烯中电输运的影响。在绝缘介质衬底(如SiO2)上支撑的石墨烯中的迁移率通常是由于带电杂质、表面粗糙度和表面极性声子(SPP)模式的散射。虽然杂质散射是限制电子迁移率的主要因素,但它可以通过实验降低。SPP和石墨烯等离子体模式之间的耦合导致界面声子-等离子体(lPP)模式的形成,这种模式也可以解释为筛选的SPP模式。利用不同衬底(SiO2, h-BN, HfO2和Al2O3)的IPP色散和电子-IPP散射率来计算负载石墨烯的衬底限制电导率和场迁移率。
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引用次数: 0
Metal contacts to MoS2: A two-dimensional semiconductor 与二硫化钼的金属接触:一种二维半导体
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256928
A. Neal, H. Liu, J. Gu, P. Ye
With increasing demands for electrostatic control as scaling continues in today's transistors, low dimensional structures continue to gain attention as a pathway for future device scaling because they offer excellent electrostatic control while remaining compatible with straightforward lithography techniques. In particular, MoS2 has attracted interest for transistor applications because its large band gap allows for field effect devices with low off-current, unlike graphene [1]. One key bottleneck, however, is the realization of ohmic contacts on MoS2 to improve FET device on-state performance. With this in mind, we evaluate Ni and Pd contacts on MoS2 as potential alternatives to the already realized Au-MoS2 and Ti-MoS2 contacts [1]. Back-gated transfer length method (TLM) structures with Au, Ni, and Pd contact metals were fabricated on exfoliated MoS2 flakes, with 300nm SiO2 on degenerately doped Si as the substrate. The data indicate that Ni, like Au, makes an ohmic contact to the n-doped MoS2 while the Pd metal contact shows Schottky behavior.
随着当今晶体管的缩放,对静电控制的需求不断增加,低维结构作为未来器件缩放的途径继续受到关注,因为它们提供了出色的静电控制,同时与直接的光刻技术保持兼容。特别是,MoS2引起了晶体管应用的兴趣,因为它的大带隙允许具有低关断电流的场效应器件,不像石墨烯[1]。然而,一个关键的瓶颈是在MoS2上实现欧姆触点以提高FET器件的导态性能。考虑到这一点,我们评估了MoS2上的Ni和Pd触点作为已经实现的Au-MoS2和Ti-MoS2触点[1]的潜在替代品。采用背门转移长度法(TLM)在剥离的二硫化钼薄片上制备了具有Au、Ni和Pd接触金属的结构,并将300nm SiO2掺杂在简并掺杂的Si上作为衬底。数据表明,Ni与Au一样,与n掺杂的MoS2形成欧姆接触,而Pd金属接触表现出肖特基行为。
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引用次数: 43
Nanostructured thermoelectric energy conversion and refrigeration devices 纳米结构热电能量转换和制冷装置
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257005
A. Shakouri
Energy consumption in our society is increasing rapidly. A significant fraction of the energy is lost in the form of heat. In this talk we introduce thermoelectric devices that allow direct conversion of heat into electricity. A key requirement to improve the efficiency is to increase the Seebeck coefficient (S) and the electrical conductivity (σ) while reducing the electronic and lattice contributions to thermal conductivity (κe+κL). Some new physical concepts and nanostructures make it possible to modify the trade-offs between the bulk material properties through the changes in the density of states, scattering rates and interface effects on the electron and phonon transport. We will review recent experimental and theoretical results on nanostructured materials of various dimensions: superlattices, nanowires, nanodots, as well as solid-state thermionic power generation devices [1]. Most of the recent success has been in the reduction of lattice thermal conductivity while maintaining good electrical conductivity. Several theoretical and experimental results to improve the thermoelectric power factor (S2σ) and reduce Lorenz number (σ/κe) are presented. Novel metal-semiconductor nanocomposites are developed where the heat and charge transport are modified at the atomic level. Theory and experiment are compared for several III-V and nitride nanocomposites and multilayers [2]. Potential to increase the energy conversion efficiency and bring the cost down to $0.1-0.2/W will be discussed [3]. We also describe how similar principles can be used to make micro refrigerators with cooling power densities exceeding 500 watts per centimeter square [4] in order to selectively remove dynamic hot spots and decrease significantly the requirements for overall cooling of the chip. We also describe some recent advances in nanoscale thermal characterization. Thermoreflectance imaging is used to measure the transient temperature distribution in power transistors. Resolution down to 100ns in time, submicron spatial and 0.1C in temperature are achieved using megapixel CCDs. Finally, the transition between energy and entropy transport in nanoscale devices will be briefly discussed.
我们社会的能源消耗正在迅速增加。很大一部分能量以热的形式损失掉了。在这次演讲中,我们将介绍热电装置,它可以将热直接转化为电。提高效率的一个关键要求是提高Seebeck系数(S)和电导率(σ),同时降低电子和晶格对导热系数(κe+κL)的贡献。一些新的物理概念和纳米结构使得通过改变态密度、散射率和界面效应对电子和声子输运的影响来改变块体材料特性之间的权衡成为可能。我们将回顾不同维度纳米结构材料的最新实验和理论结果:超晶格、纳米线、纳米点以及固态热离子发电装置[1]。最近的大多数成功都是在保持良好导电性的同时降低了晶格的导热性。给出了提高热电功率因数(S2σ)和降低洛伦兹数(σ/κe)的理论和实验结果。研制了一种新型的金属-半导体纳米复合材料,在原子水平上改变了热输运和电荷输运。理论和实验比较了几种III-V和氮化物纳米复合材料和多层材料[2]。将讨论提高能量转换效率并将成本降至0.1-0.2美元/W的潜力[3]。我们还描述了如何使用类似的原理来制造冷却功率密度超过每平方厘米500瓦的微型冰箱[4],以便有选择地去除动态热点并显着降低对芯片整体冷却的要求。我们还描述了纳米尺度热表征的一些最新进展。利用热反射成像技术测量功率晶体管的瞬态温度分布。使用百万像素的ccd可以实现时间分辨率低至100ns,空间分辨率为亚微米,温度分辨率为0.1C。最后,简要讨论了纳米器件中能量和熵输运之间的转变。
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引用次数: 0
Balancing stress & dipolar interactions for fast, low power, reliable switching in multiferroic logic 平衡应力和偶极相互作用,在多铁性逻辑中实现快速、低功耗、可靠的开关
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256929
K. Munira, S. Nadri, M. Forgues, A. Ghosh
In this work, we will focus on efficient transmission to NM2 of information just written onto NM1 with torque from a current spin polarized by the hard layer (Fig. Ib, period A). In order to propagate the logic bit unidirectionally from NMI to NM2 and switch the magnetization of the latter, a small local voltage (~10 mV) applied to the piezoelectric element stresses the magnetization of NM2 to switch to its hard axis (Fig. 1 b, period B). Upon releasing the stress, the magnetization of the NM2 relaxes to the easy axis, with its final orientation determined by the dipolar coupling with the NMI (NM3 still stressed and kept out of operation), thus achieving a fast and low power Bennett clocked computation (Fig. 1 b, period C). In this work, we will assess the interplay between stress and dipolar coupling by varying the stressing profiles (Fig. lc). Specifically we will explore the trade-off between energy dissipated, switching speed and reliability, through a thermodynamic study of the complex 3D spin dynamics of the NMs, captured within a stochastic Landau-Lifshitz-Gilbert formalism.
在这项工作中,我们将重点放在有效传播NM2只是书面上的信息NM1扭矩与电流自旋极化的硬层(图Ib,时期)。为了传播逻辑单向地将一些从敝中断NM2和开关的磁化后者,一个当地的小电压(~ 10 mV)应用于压电元件强调NM2切换到其困难的磁化轴(图1 b, b)时期。在释放压力,NM2的磁化向易轴放松,其最终方向由与NMI的偶极耦合决定(NM3仍然处于应力状态并保持不工作),从而实现了快速和低功耗的Bennett时钟计算(图1b,周期C)。在这项工作中,我们将通过改变应力分布来评估应力和偶极耦合之间的相互作用(图lc)。具体来说,我们将探索能量耗散、开关速度和可靠性之间的权衡,通过对NMs复杂3D自旋动力学的热力学研究,在随机Landau-Lifshitz-Gilbert形式中捕获。
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引用次数: 0
THz detector based on proximity effect of topological insulator 基于拓扑绝缘子邻近效应的太赫兹探测器
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256977
Xiaodong Li, Y. Semenov, K. W. Kim
Designing THz detectors that operate at room temperature is highly desirable and challenging for practical applications, such as imaging and quality control. Since the THz photon energy is very close to the thermal excitation, the room temperature operation is very restricted in conventional devices. In contrast, the topological insulators (TIs), e.g. Bi2Se3, pave a way to a new paradigm in low energy optoelectronics due to unique electronic properties of surface electrons. In this work, we analyze THz photodetectors based on the proximity effect in the hybrid TI- ferromagnetic insulator (FMI) structure (Fig.1). The predicted photocurrent of the unit cell can reach the order of 10-7A·cm/W, which is of practical importance. Moreover, the sensitivity of the proposed devices can be extended beyond the thermal limit, since the output signal can be readily distinguishable from the background thermal excitation for signals in THz/far infrared frequency domain even at room temperature.
设计在室温下工作的太赫兹探测器对于成像和质量控制等实际应用来说是非常理想和具有挑战性的。由于太赫兹光子能量非常接近热激发,传统器件的室温操作受到很大限制。相比之下,拓扑绝缘体(TIs),如Bi2Se3,由于表面电子的独特电子特性,为低能光电子学的新范式铺平了道路。在这项工作中,我们分析了基于TI-铁磁绝缘体(FMI)混合结构中的接近效应的太赫兹光电探测器(图1)。预测的单晶电池光电流可达10-7A·cm/W量级,具有实际意义。此外,所提出的器件的灵敏度可以扩展到热极限之外,因为即使在室温下,输出信号也可以很容易地与太赫兹/远红外频域信号的背景热激励区分开。
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引用次数: 0
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70th Device Research Conference
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