用浸笔纳米光刻技术制备聚合物光子结构

IF 1.5 2区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micro/Nanolithography, MEMS, and MOEMS Pub Date : 2020-01-01 DOI:10.1117/1.JMM.19.1.013501
Z. Fradkin, M. Roitman, A. Bardea, Roy Avrahamy, Yeoshua Bery, H. Ohana, M. Zohar
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引用次数: 2

摘要

摘要浸渍笔纳米光刻(DPN)是一种低成本、通用的、用于在表面上直接制作材料图案的台式技术。本研究报道了利用DPN制备基于聚合物的二维光栅纳米结构。考察了油墨成分和停留时间对其性能的影响。制作了相位掩模样机,分析了其主要特性。我们的工作结果可能有助于改进光学结构的制造工艺,包括生产具有控制焦距的微透镜。
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Fabrication of polymeric photonic structures using dip-pen nanolithography
Abstract. Dip-pen nanolithography (DPN) is a low-cost, versatile, bench-top technology for direct patterning of materials over surfaces. Our study reports on the production of two-dimensional optical grating nanostructures based on polymers, using DPN. The influence of both the ink composition and the dwell time were investigated. Prototypes of phase masks were manufactured, and their main characteristics were analyzed. The results in our work may contribute to improving the fabrication process of optical structures, including the production of microlenses with controlled focal length.
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来源期刊
CiteScore
3.40
自引率
30.40%
发文量
0
审稿时长
6-12 weeks
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