大口径大功率激光光学器件超精密制造技术研究进展

Q3 Engineering 光电工程 Pub Date : 2020-08-31 DOI:10.12086/OEE.2020.200135
F. Fei, Xu Xi, X. Qiao, Wang Jian, Zhong Bo, Xie Ruiqing, L. Xiangyang, Chen Xianhua, Wang Shengfei, Hou Jing, Deng Wenhui, An Chenhui, Zhou Lian, Zhao Shijie, Li Defeng, Zhu Yujie
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引用次数: 4

摘要

高功率固体激光惯性约束聚变装置的建设需要精确控制全空间频率误差,实现大口径光学器件的高效量产。本文综述了近年来大功率激光设备中大口径光学器件制造的重要进展。重点介绍了基于确定性超精密加工制造方法的单点金刚石飞切、非球面超精密磨削以及确定性抛光等技术。并具体阐述了这些关键技术在批量制造链中的应用现状。
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Progress on ultra precision manufacturing technology of large-aperture high-power laser optics
The construction of high-power solid-state laser facility for inertial confinement fusion requires to precisely control the full-spatial frequency error, and realize efficient mass-manufacturing of large-aperture optics. This review summarizes the recent critical progress in manufacturing of large-aperture optics in high-power laser facility. It also emphasizes the technologies such as single point diamond fly-cutting, and aspheric ultra-precision grinding, as well as deterministic polishing, based on the deterministic ultra-precision process manufacturing method. In addition, the application status of these key technologies in the mass-manufacturing chain was stated specifically.
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来源期刊
光电工程
光电工程 Engineering-Electrical and Electronic Engineering
CiteScore
2.00
自引率
0.00%
发文量
6622
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