{"title":"形纳米膜:从基本感知到新概念和应用","authors":"Y. Mei, O. Schmidt","doi":"10.1109/INEC.2010.5425203","DOIUrl":null,"url":null,"abstract":"Ultra-thin membranes out of inorganic materials can be easily formed into various shapes and geometries on a single chip. Imagine the following experiment: A compressively strained layer is released from the substrate by e.g. selective underetching. If the layer is homogeneously strained, the film forms wrinkles, whereas it bends if there is a large enough strain gradient across the thickness of the film [1]. We exploit these two phenomena to create large periodic arrays of wrinkled nanochannel arrays and rolled-up micro-and nanotubes. The unique approach to transform a 2D layer system, defined by advanced deposition and lithography techniques, into a 3D object technology [2], opens entirely new perspectives towards reproducible, size scalable and multi-functional components for on-and off-chip applications [3]. We demonstrate ionic sensitive field-effect transistors [4], novel micro-and nanojet engines [5], optofluidic sensors [6], single microtube batteries [7], new concepts for lab-in-a-tube systems [8] and metamaterial fiber optics [9].","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":"30 1","pages":"54-54"},"PeriodicalIF":0.0000,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Shaped nanomembranes: From fundamental perception to new concepts and applications\",\"authors\":\"Y. Mei, O. Schmidt\",\"doi\":\"10.1109/INEC.2010.5425203\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ultra-thin membranes out of inorganic materials can be easily formed into various shapes and geometries on a single chip. Imagine the following experiment: A compressively strained layer is released from the substrate by e.g. selective underetching. If the layer is homogeneously strained, the film forms wrinkles, whereas it bends if there is a large enough strain gradient across the thickness of the film [1]. We exploit these two phenomena to create large periodic arrays of wrinkled nanochannel arrays and rolled-up micro-and nanotubes. The unique approach to transform a 2D layer system, defined by advanced deposition and lithography techniques, into a 3D object technology [2], opens entirely new perspectives towards reproducible, size scalable and multi-functional components for on-and off-chip applications [3]. We demonstrate ionic sensitive field-effect transistors [4], novel micro-and nanojet engines [5], optofluidic sensors [6], single microtube batteries [7], new concepts for lab-in-a-tube systems [8] and metamaterial fiber optics [9].\",\"PeriodicalId\":6390,\"journal\":{\"name\":\"2010 3rd International Nanoelectronics Conference (INEC)\",\"volume\":\"30 1\",\"pages\":\"54-54\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-03-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 3rd International Nanoelectronics Conference (INEC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INEC.2010.5425203\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 3rd International Nanoelectronics Conference (INEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INEC.2010.5425203","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Shaped nanomembranes: From fundamental perception to new concepts and applications
Ultra-thin membranes out of inorganic materials can be easily formed into various shapes and geometries on a single chip. Imagine the following experiment: A compressively strained layer is released from the substrate by e.g. selective underetching. If the layer is homogeneously strained, the film forms wrinkles, whereas it bends if there is a large enough strain gradient across the thickness of the film [1]. We exploit these two phenomena to create large periodic arrays of wrinkled nanochannel arrays and rolled-up micro-and nanotubes. The unique approach to transform a 2D layer system, defined by advanced deposition and lithography techniques, into a 3D object technology [2], opens entirely new perspectives towards reproducible, size scalable and multi-functional components for on-and off-chip applications [3]. We demonstrate ionic sensitive field-effect transistors [4], novel micro-and nanojet engines [5], optofluidic sensors [6], single microtube batteries [7], new concepts for lab-in-a-tube systems [8] and metamaterial fiber optics [9].