Jae‐Woong Jeong, B. Park, H. Keum, Seok Kim, J. Rogers, O. Solgaard
{"title":"高反射率，宽带单片硅光子晶体反射镜在两轴MEMS扫描仪转移打印","authors":"Jae‐Woong Jeong, B. Park, H. Keum, Seok Kim, J. Rogers, O. Solgaard","doi":"10.1109/OMN.2013.6659040","DOIUrl":null,"url":null,"abstract":"We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"18 1","pages":"23-24"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing\",\"authors\":\"Jae‐Woong Jeong, B. Park, H. Keum, Seok Kim, J. Rogers, O. Solgaard\",\"doi\":\"10.1109/OMN.2013.6659040\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"18 1\",\"pages\":\"23-24\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659040\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659040","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing
We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.
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