非冷却红外探测器的单位质量高吸收亚波长结构

Avijit Das, M. Mah, J. Talghader
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引用次数: 0

摘要

采用最大吸收质量比的亚波长穿孔结构,构建了一种非制冷红外$(\lambda \sim 8-12\ \mu \mathrm{m})$热探测器,工作在空气中,噪声等效温差(NETD)为$23 \text{mK}$,探测率为$1.1\times 10^{9}\text{cm}\sqrt{\mathrm{H}\mathrm{z}}/\mathrm{W}$,时间常数为1.5 ms。与$\sim 27\%$的填充因子,探测器显示的平均吸收每单位质量$\sim 6.8\times 10^{12}\text{kg}^{-1}$在长波红外体制。探测器的光学读出采用了马赫-曾德尔干涉法。
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High Absorption per Unit Mass Subwavelength Structure as Uncooled Infrared Detector
A subwavelength perforated structure designed for a maximum absorption-to-mass ratio has been utilized to construct an uncooled infrared $(\lambda \sim 8-12\ \mu \mathrm{m})$ thermal detector operating in air with a noise equivalent temperature difference (NETD) of $23 \text{mK}$ and detectivity of $1.1\times 10^{9}\text{cm}\sqrt{\mathrm{H}\mathrm{z}}/\mathrm{W}$ while time constant is 1.5 ms. With a fill factor of $\sim 27\%$, the detector shows an average absorption per unit mass of $\sim 6.8\times 10^{12}\text{kg}^{-1}$ over the long-wave infrared regime. Mach-Zehnder interferometry has been used for optical readout of the detector.
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