{"title":"具有可调调谐特性的广泛可调谐微机械光学滤波器","authors":"C. Lin, Junxiang Fu, J. Harris","doi":"10.1109/LEOS.2001.969293","DOIUrl":null,"url":null,"abstract":"We designed a new tunable filter with a top DBR structure of Al/sub 2/O/sub 3//GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter.","PeriodicalId":18008,"journal":{"name":"LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)","volume":"22 1","pages":"298-299 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"2001-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Widely tunable micromachined optical filter with adjustable tuning characteristics\",\"authors\":\"C. Lin, Junxiang Fu, J. Harris\",\"doi\":\"10.1109/LEOS.2001.969293\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We designed a new tunable filter with a top DBR structure of Al/sub 2/O/sub 3//GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter.\",\"PeriodicalId\":18008,\"journal\":{\"name\":\"LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)\",\"volume\":\"22 1\",\"pages\":\"298-299 vol.1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-11-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LEOS.2001.969293\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOS.2001.969293","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Widely tunable micromachined optical filter with adjustable tuning characteristics
We designed a new tunable filter with a top DBR structure of Al/sub 2/O/sub 3//GaAs and demonstrated a tunable filter using this design. Adjustable tuning characteristics were achieved by removing excess nitride, providing greater yield during the release process, as well as being able to achieve a flexible structure afterward. The mechanical and optical measurements both demonstrate realization of a narrow linewidth, broad tuning range optical filter.
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