微波退火Al+注入4H-SiC p+-i-n二极管的温度依赖电流-电压特性

A. Nath, M. V. Rao, Francesco Moscatelli, Maurizio Puzzanghera, Fulvio Mancarella, R. Nipoti
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引用次数: 2

摘要

本文研究了微波退火4H-SiC垂直p+-i-n二极管的温度依赖性电流-电压特性,以确定影响这些二极管产生-复合电流的一些陷阱。
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Temperature dependent current-voltage characteristics of microwave annealed Al+ implanted 4H-SiC p+-i-n diodes
In this work the temperature dependent current-voltage characteristics of microwave annealed 4H-SiC vertical p+-i-n diodes are studied to identify some of the traps which affect the generation-recombination current of these diodes.
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