微金字塔阵列飞切技术研究

Q3 Engineering 光电工程 Pub Date : 2020-08-31 DOI:10.12086/OEE.2020.190179
Du Dan, Huang Yuetian, Fan Bin
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引用次数: 1

摘要

微结构阵列光学元件的制作越来越受到人们的关注。单点金刚石飞切技术以其效率高、成本低、加工精度高等优点,已逐步应用于微结构的加工中。本文主要研究了飞刀车削微锥体结构时机床重复定位误差和循环加工引入的误差对微结构车削效果的影响,分析了v型槽车削时二次槽产生的条件,研究了抑制二次槽产生的方法。最后通过实验验证了控制车削深度大于最小车削深度可以抑制二次槽的产生。
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Research on flying cutting technology with micro pyramid array structure
The fabrication of optical elements with microstructural arrays has attracted more and more attention. Single-point diamond flying cutting technology has been gradually applied to the fabrication of microstructures with the advantages of high efficiency, low cost and high machining accuracy. This paper mainly studies the influence of repeated positioning errors of machine tools and errors introduced by cyclic machining on micro-structure turning effect when flying cutter turning micro-pyramid structure, analyses the conditions of secondary groove generation in V-groove turning, studies the methods of restraining secondary groove generation, and finally verifies through experiments that the generation of secondary groove can be restrained by controlling the turning depth greater than the minimum turning depth.
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来源期刊
光电工程
光电工程 Engineering-Electrical and Electronic Engineering
CiteScore
2.00
自引率
0.00%
发文量
6622
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