基于超薄双金属硅谐振器的光热传感器

T. Ono, S. Yoshida, Y. Kawai, M. Esashi
{"title":"基于超薄双金属硅谐振器的光热传感器","authors":"T. Ono, S. Yoshida, Y. Kawai, M. Esashi","doi":"10.1109/MEMSYS.2007.4433165","DOIUrl":null,"url":null,"abstract":"In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Photothermal transducer based on ultrathin bimetal Si resonator\",\"authors\":\"T. Ono, S. Yoshida, Y. Kawai, M. Esashi\",\"doi\":\"10.1109/MEMSYS.2007.4433165\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433165\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433165","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

本文提出了一种由超薄金/硅双金属悬臂梁作为谐振腔组成的光热换能器,其总厚度为45 nm,质量因子为-12000。该换能器质量因数高,体积小,对光热效应敏感,热响应频率可达140 kHz。结果表明,由于非线性光热效应,弱激光的照射可以提高换能器的响应。机械调频检测调制光演示使用这种双金属换能器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Photothermal transducer based on ultrathin bimetal Si resonator
In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Process compensated micromechanical resonators A novel scanning Thermal Microscopy System High aspect ratio nano-scale CFX structures fabricated by deep-rie Electrochromic voxel array for 3D display Pyrolyzed polymer mesh electrode integrated into fluidic channel for gate type sensor
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1