Design and fabrication of 4 channels silica cross optical waveguide delay line array

In this paper,an integrated 4-channels silica optical waveguide delay line array with low cost and low propagation loss was designed and manufactured. BPM software was selected to simulate the associated pa-rameters,including Y splitter and bend loss. In order to reduce the device size and insertion loss,the smallest bending radius of the delay line was selected to be 1 500 μm. And the structure of optimizing gradient Y splitter and right angle intersecting waveguide were optimized. The cross waveguide delay line device was manufactured by standard semiconductor manufacturing processes. The output infrared pattern was obtained. The delay time of each channel was 0 ps,113 ps,226 ps and 339 ps,respectively. The 4-channels silica waveguide delay line device can achieve an equal interval of delay time between the adjacent channels. It can be integrated with itself for several times to increase delay time. The output waveguide of the device can be integrated with the optical fiber array at the same time.