Mario Lanza, Y. Wang, Huiling Duan, M. Porti, M. Nafría, A. Bayerl, X. Aymerich, T. Gao, Zhongfan Liu, Yudao Zhang, H. Liang, Guangyin Jing
{"title":"石墨烯在不同衬底上的纳米形貌","authors":"Mario Lanza, Y. Wang, Huiling Duan, M. Porti, M. Nafría, A. Bayerl, X. Aymerich, T. Gao, Zhongfan Liu, Yudao Zhang, H. Liang, Guangyin Jing","doi":"10.1109/CDE.2013.6481394","DOIUrl":null,"url":null,"abstract":"Graphene layers can be used as the conductive channel in metal oxide semiconductor field effect transistors, metallic electrodes in capacitors, etc. However, when graphene is grown by chemical vapor deposition (CVD), substrate-induced corrugations and strain-related wrinkles formed on the graphene layer impoverish the properties of these devices by lowering the conductance and increasing their variability. In this work, different nanoscale experimental techniques have been used to investigate the morphology of as-grown and transferred graphene sheets on different substrates. We show that while the compressive strain (from the growth process) in the graphene sheet on flat substrates is minimized by generating wrinkles, on rough substrates it can be minimized by improving the graphene-substrate adhesion, leading to lower densities of wrinkles. This method allows the design of wrinkle-free graphene based devices.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"24 1","pages":"269-272"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanoscale morphology of graphene on different substrates\",\"authors\":\"Mario Lanza, Y. Wang, Huiling Duan, M. Porti, M. Nafría, A. Bayerl, X. Aymerich, T. Gao, Zhongfan Liu, Yudao Zhang, H. Liang, Guangyin Jing\",\"doi\":\"10.1109/CDE.2013.6481394\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Graphene layers can be used as the conductive channel in metal oxide semiconductor field effect transistors, metallic electrodes in capacitors, etc. However, when graphene is grown by chemical vapor deposition (CVD), substrate-induced corrugations and strain-related wrinkles formed on the graphene layer impoverish the properties of these devices by lowering the conductance and increasing their variability. In this work, different nanoscale experimental techniques have been used to investigate the morphology of as-grown and transferred graphene sheets on different substrates. We show that while the compressive strain (from the growth process) in the graphene sheet on flat substrates is minimized by generating wrinkles, on rough substrates it can be minimized by improving the graphene-substrate adhesion, leading to lower densities of wrinkles. This method allows the design of wrinkle-free graphene based devices.\",\"PeriodicalId\":6614,\"journal\":{\"name\":\"2013 Spanish Conference on Electron Devices\",\"volume\":\"24 1\",\"pages\":\"269-272\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-03-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Spanish Conference on Electron Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CDE.2013.6481394\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Spanish Conference on Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CDE.2013.6481394","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanoscale morphology of graphene on different substrates
Graphene layers can be used as the conductive channel in metal oxide semiconductor field effect transistors, metallic electrodes in capacitors, etc. However, when graphene is grown by chemical vapor deposition (CVD), substrate-induced corrugations and strain-related wrinkles formed on the graphene layer impoverish the properties of these devices by lowering the conductance and increasing their variability. In this work, different nanoscale experimental techniques have been used to investigate the morphology of as-grown and transferred graphene sheets on different substrates. We show that while the compressive strain (from the growth process) in the graphene sheet on flat substrates is minimized by generating wrinkles, on rough substrates it can be minimized by improving the graphene-substrate adhesion, leading to lower densities of wrinkles. This method allows the design of wrinkle-free graphene based devices.