线性驱动压电微悬臂梁的四方组成PZT薄膜

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474266

T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda

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引用次数: 6

摘要

我们采用四边形成分Pb(Zr0.3, Ti0.7)O3 (tetrai - pzt)薄膜制备了压电微悬臂梁，并对其在交流驱动条件下的位移-电压行为进行了表征。采用交流电压80 V“唤醒”处理后，薄膜的残余极化、矫顽力电压和压电常数d31分别提高到65.5 μC/Cm2、20 V和-42 pm/V。在-15 V ~ 15 V的交流驱动条件下，采用四压电薄膜制备的压电微悬臂梁成功地表现出了线性位移-电压行为。

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Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as "wakeup" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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