{"title":"三自由度长行程电磁直驱纳米定位台的设计与驱动","authors":"Xixian Mo, Bo Zhang","doi":"10.1109/3M-NANO.2017.8286316","DOIUrl":null,"url":null,"abstract":"In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"7 1","pages":"236-241"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design and driving of a 3-DOF electromagnetic direct-drive nanopositioning stage with long stroke\",\"authors\":\"Xixian Mo, Bo Zhang\",\"doi\":\"10.1109/3M-NANO.2017.8286316\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.\",\"PeriodicalId\":6582,\"journal\":{\"name\":\"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"7 1\",\"pages\":\"236-241\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2017.8286316\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2017.8286316","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and driving of a 3-DOF electromagnetic direct-drive nanopositioning stage with long stroke
In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.
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