P. Frigerio, L. Molinari, A. Barbieri, R. Carminati, N. Boni, G. Langfelder
{"title":"嵌入式压阻传感和抑制杂散模式的准静态扫描PZT微镜闭环控制","authors":"P. Frigerio, L. Molinari, A. Barbieri, R. Carminati, N. Boni, G. Langfelder","doi":"10.1109/Transducers50396.2021.9495680","DOIUrl":null,"url":null,"abstract":"The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to ± 0.03°, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"77 1","pages":"435-438"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection\",\"authors\":\"P. Frigerio, L. Molinari, A. Barbieri, R. Carminati, N. Boni, G. Langfelder\",\"doi\":\"10.1109/Transducers50396.2021.9495680\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to ± 0.03°, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.\",\"PeriodicalId\":6814,\"journal\":{\"name\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"volume\":\"77 1\",\"pages\":\"435-438\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/Transducers50396.2021.9495680\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/Transducers50396.2021.9495680","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection
The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to ± 0.03°, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.
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