分子束外延生长的异价半导体结构与器件

Yong-Hang Zhang, David J. Smith
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引用次数: 10

摘要

由II-VI族/ III-V族化合物半导体组成的异价结构提供了吸引人的特性,例如非常宽的带隙范围、大的导带偏移、高的电子和空穴迁移率,以及电场诱导的拓扑绝缘体态等量子材料特性。这些特性和特征对于许多电子和光电子器件以及潜在的凝聚态量子物理应用都是非常理想的。在这里,我们概述了我们最近对锌闪锌矿II-VI/III-V异质结构的MBE生长和表征的研究,以及基于这些材料的几种新器件的应用。通过结合晶格错配较小的材料,如ZnTe/GaSb (Δa/a ~ 0.13%)、CdTe/InSb (Δa/a ~ 0.05%)和ZnSe/GaAs (Δa/a ~ 0.26%),一旦生长条件优化,就可以生长出结晶度优异的外延膜。使用常规和原子分辨率电子显微镜的横断面观察显示了相干界面和接近无缺陷的异质结构。通过CdTe/InSb界面的测量表明,化学混合量有限(~ 1.5 nm)。简要介绍了ZnTe/GaSb分布布拉格反射器、CdTe/MgxCd1−xTe双异质结构和CdTe/InSb双色光电探测器的研究结果,并描述了岩盐/锌闪锌矿PbTe/CdTe/InSb异质结构的生长情况。
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Heterovalent semiconductor structures and devices grown by molecular beam epitaxy
Heterovalent structures consisting of group II-VI/group III-V compound semiconductors offer attractive properties, such as a very broad range of bandgaps, large conduction band offsets, high electron and hole mobilities, and quantum-material properties such as electric-field-induced topological insulator states. These properties and characteristics are highly desirable for many electronic and optoelectronic devices as well as potential condensed-matter quantum-physics applications. Here, we provide an overview of our recent studies of the MBE growth and characterization of zincblende II-VI/III-V heterostructures as well as several novel device applications based on different sets of these materials. By combining materials with small lattice mismatch, such as ZnTe/GaSb (Δa/a ∼ 0.13%), CdTe/InSb (Δa/a ∼ 0.05%), and ZnSe/GaAs (Δa/a ∼ 0.26%), epitaxial films of excellent crystallinity were grown once the growth conditions had been optimized. Cross-sectional observations using conventional and atomic-resolution electron microscopy revealed coherent interfaces and close to defect-free heterostructures. Measurements across CdTe/InSb interfaces indicated a limited amount (∼1.5 nm) of chemical intermixing. Results for ZnTe/GaSb distributed Bragg reflectors, CdTe/MgxCd1−xTe double heterostructures, and CdTe/InSb two-color photodetectors are briefly presented, and the growth of a rock salt/zincblende PbTe/CdTe/InSb heterostructure is also described.
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