Glenson R. Panghulan, M. Vasquez, Y. Edañol, N. Chanlek, L. Payawan
{"title":"作为可见光活性光催化剂的TiN/ n掺杂TiO2复合薄膜的合成","authors":"Glenson R. Panghulan, M. Vasquez, Y. Edañol, N. Chanlek, L. Payawan","doi":"10.1116/6.0000304","DOIUrl":null,"url":null,"abstract":"Titanium nitride/nitrogen-doped titanium oxide (TiN/N-doped TiO 2) composite films were synthesized for visible light photodegradation applications. Thin films of TiN were sputter-deposited on precleaned glass substrates in an admixture of argon and nitrogen gases. The grown TiN films were subsequently oxidized in air at 350 °C at 15, 30, and 60 min. Raman spectral analysis revealed the formation of TiO 2 with anatase structure at 15 min and transitioned to the rutile structure at longer oxidation times. X-ray photoelectron spectral analysis revealed the formation of N-doped TiO 2 from the oxidized Ti. Visible light-induced photodegradation of methylene blue as test analyte showed 30% removal efficiency after exposure to visible light after 2.5 h. The highest degradation efficiency was observed when the anatase phase of TiO 2 is the dominant phase in the film. Moreover, N-doping realized the visible light sensitivity of TiO 2. This makes the composite film ideal for solar light-driven photodegradation of organic contaminants in wastewater.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"8 1","pages":"062203"},"PeriodicalIF":0.0000,"publicationDate":"2020-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst\",\"authors\":\"Glenson R. Panghulan, M. Vasquez, Y. Edañol, N. Chanlek, L. Payawan\",\"doi\":\"10.1116/6.0000304\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Titanium nitride/nitrogen-doped titanium oxide (TiN/N-doped TiO 2) composite films were synthesized for visible light photodegradation applications. Thin films of TiN were sputter-deposited on precleaned glass substrates in an admixture of argon and nitrogen gases. The grown TiN films were subsequently oxidized in air at 350 °C at 15, 30, and 60 min. Raman spectral analysis revealed the formation of TiO 2 with anatase structure at 15 min and transitioned to the rutile structure at longer oxidation times. X-ray photoelectron spectral analysis revealed the formation of N-doped TiO 2 from the oxidized Ti. Visible light-induced photodegradation of methylene blue as test analyte showed 30% removal efficiency after exposure to visible light after 2.5 h. The highest degradation efficiency was observed when the anatase phase of TiO 2 is the dominant phase in the film. Moreover, N-doping realized the visible light sensitivity of TiO 2. This makes the composite film ideal for solar light-driven photodegradation of organic contaminants in wastewater.\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":\"8 1\",\"pages\":\"062203\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0000304\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000304","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst
Titanium nitride/nitrogen-doped titanium oxide (TiN/N-doped TiO 2) composite films were synthesized for visible light photodegradation applications. Thin films of TiN were sputter-deposited on precleaned glass substrates in an admixture of argon and nitrogen gases. The grown TiN films were subsequently oxidized in air at 350 °C at 15, 30, and 60 min. Raman spectral analysis revealed the formation of TiO 2 with anatase structure at 15 min and transitioned to the rutile structure at longer oxidation times. X-ray photoelectron spectral analysis revealed the formation of N-doped TiO 2 from the oxidized Ti. Visible light-induced photodegradation of methylene blue as test analyte showed 30% removal efficiency after exposure to visible light after 2.5 h. The highest degradation efficiency was observed when the anatase phase of TiO 2 is the dominant phase in the film. Moreover, N-doping realized the visible light sensitivity of TiO 2. This makes the composite film ideal for solar light-driven photodegradation of organic contaminants in wastewater.