用于动态太赫兹波开关的MEMS超材料

2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) Pub Date : 2016-08-01 DOI:10.1109/NANO.2016.7751545

Zhengli Han, Takuya Takahashi, H. Toshiyoshi

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引用次数: 0

摘要

利用MEMS超材料的方法，提出了一种具有偏振依赖性的太赫兹动态开关。劈开环谐振器(srr)位于绝缘体上硅(SOI)晶圆上，在那里蚀刻埋地氧化物(BOX)，使硅层与srr一起作为机电快门来控制入射太赫兹波的传播。快门操作采用静电驱动。

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A MEMS metamaterial for dynamic terahertz wave switching

A terahertz (THz) dynamic switch with polarization dependence is proposed with MEMS metamaterial method. The split ring resonators (SRRs) are located on a silicon-on-insulator (SOI) wafer, where the buried oxide (BOX) is etched to let the silicon layer together with the SRRs work as an electromechanical shutter to control the incident THz wave propagation. Electrostatic actuation is employed for the shutter operation.

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2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)

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