P. Szyszka, T. Grzebyk, M. Białas, A. Gorecka-Drzazga, J. Dziuban, D. Hasan, Chang-Soon Lee
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This paper presents the concept of a MEMS mass spectrometer, which integrates all necessary modules on a single vacuum-sealed chip: a high vacuum micropump, a sample injection system, an ion source, an analyzer and a detector. Our MEMS mass spectrometer chip is fabricated using monocrystalline silicon and borosilicate glass substrates has dimensions of $10 \times 10 \times35$ mm 3 and internal volume of 0.45 cm 3.
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