基于微机械聚二甲苯膜片的压电双晶片麦克风

IEEE\/ASME Journal of Microelectromechanical Systems Pub Date : 2003-12-01 DOI:10.1109/JMEMS.2003.820288

Meng-Nian Niu, E. S. Kim

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引用次数: 35

摘要

本文介绍了一种新型的双晶片压电传声器，该传声器建立在具有c轴方向相反的两个ZnO薄膜的聚对二甲苯微机械膜片上。双晶圆聚苯乙烯膜片传声器的灵敏度和信噪比(SNR)都大大高于传统的单晶圆氮化硅膜片传声器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Piezoelectric bimorph microphone built on micromachined parylene diaphragm

This paper describes a novel bimorph piezoelectric microphone built on a micromachined parylene diaphragm with two ZnO films of opposite c-axis orientations. Both the sensitivity and signal-to-noise ratio (SNR) of the bimorph parylene-diaphragm microphone have been demonstrated to be much higher than those of a conventional unimorph silicon-nitride-diaphragm microphone.

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来源期刊

$IEEE\/ASME Journal of Microelectromechanical Systems$

IEEE\/ASME Journal of Microelectromechanical Systems

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