通过共振频率测量监测AFM尖端磨损的分析模型

Kiran Dhope, S. Tallur
{"title":"通过共振频率测量监测AFM尖端磨损的分析模型","authors":"Kiran Dhope, S. Tallur","doi":"10.1109/icee44586.2018.8937987","DOIUrl":null,"url":null,"abstract":"A sharp tip is essential for high resolution surface characterization images using atomic force microscope (AFM). We propose an analytical model for in-situ monitoring of AFM tip wear by tracking the resonance frequency of the cantilever tip that can be measured in a commercial AFM. The tip is modeled as a mass-loaded cantilever, and an expression for the resonance frequency shift with changing tip height is obtained analytically. The model agrees well with FEM simulations performed in COMSOL FEM and experimental measurements conducted with an Oxford Asylum MFP3D Origin AFM.","PeriodicalId":6590,"journal":{"name":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","volume":"57 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Analytical model for monitoring of AFM tip wear through resonance frequency measurements\",\"authors\":\"Kiran Dhope, S. Tallur\",\"doi\":\"10.1109/icee44586.2018.8937987\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A sharp tip is essential for high resolution surface characterization images using atomic force microscope (AFM). We propose an analytical model for in-situ monitoring of AFM tip wear by tracking the resonance frequency of the cantilever tip that can be measured in a commercial AFM. The tip is modeled as a mass-loaded cantilever, and an expression for the resonance frequency shift with changing tip height is obtained analytically. The model agrees well with FEM simulations performed in COMSOL FEM and experimental measurements conducted with an Oxford Asylum MFP3D Origin AFM.\",\"PeriodicalId\":6590,\"journal\":{\"name\":\"2018 4th IEEE International Conference on Emerging Electronics (ICEE)\",\"volume\":\"57 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 4th IEEE International Conference on Emerging Electronics (ICEE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/icee44586.2018.8937987\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/icee44586.2018.8937987","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

对于原子力显微镜(AFM)的高分辨率表面表征图像,尖锐的尖端是必不可少的。我们提出了一种分析模型,通过跟踪可在商用AFM中测量的悬臂尖端的共振频率来原位监测AFM尖端磨损。将叶尖建模为受质量载荷的悬臂梁,得到了随叶尖高度变化的共振频移解析表达式。该模型与COMSOL有限元模拟和Oxford Asylum MFP3D Origin AFM实验结果吻合较好。
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Analytical model for monitoring of AFM tip wear through resonance frequency measurements
A sharp tip is essential for high resolution surface characterization images using atomic force microscope (AFM). We propose an analytical model for in-situ monitoring of AFM tip wear by tracking the resonance frequency of the cantilever tip that can be measured in a commercial AFM. The tip is modeled as a mass-loaded cantilever, and an expression for the resonance frequency shift with changing tip height is obtained analytically. The model agrees well with FEM simulations performed in COMSOL FEM and experimental measurements conducted with an Oxford Asylum MFP3D Origin AFM.
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