(1-y)BST-yMgO薄膜纳米力学性能研究

Dionizy Czekaja , Agata Lisińska-Czekaja , Julian Plewab
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引用次数: 2

摘要

本研究采用溶胶-凝胶型化学溶液沉积法在不锈钢衬底上制备了MgO改性Ba0.6Sr0.4TiO3 (BST60/40)固溶体薄膜。采用多层自旋镀膜法沉积Ba0.6Sr0.4TiO3-MgO薄膜,并在T=650 ~ 750℃下进行热处理。用热重法和差热分析法研究了干燥后的BST60/40-MgO凝胶粉的热化学性质。利用x射线衍射分析对薄膜的相组成和晶体结构进行表征。采用纳米压痕法研究了y=1、3和5 mol.% MgO掺杂对BST60/40薄膜纳米力学性能的影响。发现BST6040薄膜采用四边形P4mm(99)结构。BST60/40基元的体积、平均硬度和杨氏模量的平均值随MgO添加量的增加而减小。
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Study of nanomechanical properties of (1-y)BST-yMgO thin films

In the present study thin films of MgO – modified Ba0.6Sr0.4TiO3 (BST60/40) solid solution were prepared by the sol-gel-type chemical solution deposition method on stainless steel substrates. A multilayer spin-coating approach was utilized for the Ba0.6Sr0.4TiO3-MgO thin film deposition with subsequent thermal annealing at T=650-750°C. Dried BST60/40-MgO gel powders were studied with thermogravimetric and differential thermal analysis to determine their thermochemical properties. X-ray diffraction analysis was utilized for thin film characterization in terms of its phase composition and crystal structure. The influence of y=1, 3 and 5 mol.% MgO doping on nanomechanical properties of BST60/40 thin films was studied with nanoindentation. It was found that BST6040 thin films adopted the tetragonal P4mm (99) structure. The volume of the BST60/40 elementary cell, the average hardness as well as the mean value of the Young modulus decreased with an increase in amount of MgO.

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