Abhai Kumar, S. Nambiar, Rakshitha Kallega, P. Ranganath, S. Selvaraja
{"title":"用于聚合物波导耦合的氮化硅辅助SU8光栅","authors":"Abhai Kumar, S. Nambiar, Rakshitha Kallega, P. Ranganath, S. Selvaraja","doi":"10.1109/icee44586.2018.8937998","DOIUrl":null,"url":null,"abstract":"A Silicon Nitride assisted SU8 hybrid grating coupler is proposed as a means for coupling to single mode polymer waveguides. Using direct writing approach a patch grating coupler efficiency of -3.9 dB is experimentally demonstrated.","PeriodicalId":6590,"journal":{"name":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","volume":"5 3 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Silicon Nitride assisted SU8 Grating for Polymer Waveguide Coupling\",\"authors\":\"Abhai Kumar, S. Nambiar, Rakshitha Kallega, P. Ranganath, S. Selvaraja\",\"doi\":\"10.1109/icee44586.2018.8937998\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A Silicon Nitride assisted SU8 hybrid grating coupler is proposed as a means for coupling to single mode polymer waveguides. Using direct writing approach a patch grating coupler efficiency of -3.9 dB is experimentally demonstrated.\",\"PeriodicalId\":6590,\"journal\":{\"name\":\"2018 4th IEEE International Conference on Emerging Electronics (ICEE)\",\"volume\":\"5 3 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 4th IEEE International Conference on Emerging Electronics (ICEE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/icee44586.2018.8937998\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/icee44586.2018.8937998","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Silicon Nitride assisted SU8 Grating for Polymer Waveguide Coupling
A Silicon Nitride assisted SU8 hybrid grating coupler is proposed as a means for coupling to single mode polymer waveguides. Using direct writing approach a patch grating coupler efficiency of -3.9 dB is experimentally demonstrated.
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