{"title":"通过纺丝涂层和光刻技术制备微桥,无需蚀刻","authors":"F. Zygalsky, I. Von Lampe, S. Götze","doi":"10.1016/S0964-1807(99)00044-7","DOIUrl":null,"url":null,"abstract":"<div><p><span><span><span>It is possible to produce HTSC<span> thin films of polymer </span></span>metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by </span>photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (</span><em>T</em><sub>c</sub>) measured on the 20 and 200<!--> <em>μ</em>m wide microbridges are 82<!--> <!-->K for Y–Ba–Cu–O and 108<!--> <!-->K for Bi–Sr–Ca–Cu–O. The critical current density (<em>j</em><sub>c</sub>) obtained is 10<sup>5</sup> A/cm<sup>2</sup> for 65<!--> <!-->K.</p></div>","PeriodicalId":100110,"journal":{"name":"Applied Superconductivity","volume":"6 10","pages":"Pages 795-798"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S0964-1807(99)00044-7","citationCount":"3","resultStr":"{\"title\":\"Microbridge preparation through spincoating and photolithography without etching\",\"authors\":\"F. Zygalsky, I. Von Lampe, S. Götze\",\"doi\":\"10.1016/S0964-1807(99)00044-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span><span><span>It is possible to produce HTSC<span> thin films of polymer </span></span>metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by </span>photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (</span><em>T</em><sub>c</sub>) measured on the 20 and 200<!--> <em>μ</em>m wide microbridges are 82<!--> <!-->K for Y–Ba–Cu–O and 108<!--> <!-->K for Bi–Sr–Ca–Cu–O. The critical current density (<em>j</em><sub>c</sub>) obtained is 10<sup>5</sup> A/cm<sup>2</sup> for 65<!--> <!-->K.</p></div>\",\"PeriodicalId\":100110,\"journal\":{\"name\":\"Applied Superconductivity\",\"volume\":\"6 10\",\"pages\":\"Pages 795-798\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S0964-1807(99)00044-7\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Superconductivity\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0964180799000447\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Superconductivity","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0964180799000447","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microbridge preparation through spincoating and photolithography without etching
It is possible to produce HTSC thin films of polymer metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (Tc) measured on the 20 and 200 μm wide microbridges are 82 K for Y–Ba–Cu–O and 108 K for Bi–Sr–Ca–Cu–O. The critical current density (jc) obtained is 105 A/cm2 for 65 K.