Lei Zhang, L. Gu, Xiaodong Han, Huan Huang, Yanan Dai, Yan Cheng, Yang Wang, Zemin Zhang, Yi-qun Wu, Bo Liu, Zhitang Song
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The Influence of Sputtering Power on Phase-Change Films
Sputter-deposited amorphous films of a phase-change material (Ge2Sb2Te5) were prepared with various magnetron sputtering powers to determine its influence. Microscopic characteristics indicate that the sputtering power affects the film morphology: high sp
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