Biomimetic locomotion for a robotic stingray using MEMS sensors

In this paper, we present the design, fabrication and experimental results of two types of MEMS sensors for manoeuvring and control of a robotic stingray. The first sensor is a piezoresistive liquid crystal polymer haircell flow sensor which is employed to determine the velocity of propagation of the stingray. The second sensor is a Pb(Zr0.52Ti0.48)O3 piezoelectric micro-diaphragm pressure sensor which measures various flapping profiles of the stingray's fins which are keys parameters to control the robot locomotion. The piezoelectric sensors show an excellent performance in tracking the trajectory of the fins of the stingray. Although a robotic stingray is used as a platform to emphasize the role of the MEMS sensors, the applications can be extended to most underwater robotic vehicles (URVs).