光敏纳米复合材料聚合物- mems双轴反射镜

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659079

J. Suzuki, T. Miura, K. Terao, H. Takao, F. Shimokawa, T. Namazu, F. Oohira, Takaaki Suzuki

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引用次数: 2

摘要

我们提出了一种简单的双轴聚合物MEMS反射镜的制造方法，该反射镜由含有磁性纳米颗粒的负光刻胶SU-8制成，作为磁驱动驱动器。所提出的反射镜是利用外磁场的磁力来驱动的。因此，它不需要复杂的布线模式，只需通过光刻就可以简单地制造。为了评估反射镜的驱动特性，我们使用激光位置传感器测量了反射镜的静态偏转角和频率响应。因此，我们得到了光学偏转角±15°。扭转振荡第二共振频率29.2Hz。

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Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite

We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn't need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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